Semiconductor device

ABSTRACT

A semiconductor device includes a semiconductor layer overlapping with a gate electrode and having an impurity region outside a region which overlaps with the gate electrode; a first conductive layer which is provided on a side provided with the gate electrode of the semiconductor layer and partially in contact with the impurity region; an insulating layer provided over the gate electrode and the first conductive layer; and a second conductive layer which is formed in the insulating layer and in contact with the first conductive layer through an opening at least part of which overlaps with the first conductive layer.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and amanufacturing method thereof. In this specification, the semiconductordevice refers to any device which can function with the use ofsemiconductor characteristics.

2. Description of the Related Art

In recent years, the information society has been increasinglydeveloped, and the demand for higher speed, larger capacitance, smallersize, lighter weight, or the like of information communication equipmentsuch as a personal computer or a mobile phone has been increased. Withsuch a trend of the times, LSI (large scale integration) has been neededto be provided with higher integration, higher speed, and lower powerconsumption, and as a result, higher performance and miniaturization ofeach transistor for forming LSI are essential.

In view of higher performance and miniaturization of a transistor,various structures have been considered for a thin film transistor. Forexample, in order to realize higher performance and miniaturization of athin film transistor, reduction in thickness of a semiconductor layerhas been progressed.

For example, the present applicant has proposed to use a thincrystalline semiconductor film with a thickness of less than or equal to30 nm as an active layer of a TFT. Specifically, a technique has beendisclosed in which, after an amorphous semiconductor film with athickness of greater than or equal to 40 nm is crystallized, thecrystallized semiconductor film is entirely or selectively etched toform a region with a thickness of less than or equal to 30 nm, and theregion thinned to less than or equal to 30 nm is used as a channelformation region (Reference 1: Japanese Published Patent Application No.H7-335906).

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a semiconductordevice with higher reliability and a manufacturing method thereof inorder to enhance the performance of the semiconductor devices. Inaddition, it is another object to provide a semiconductor device whichdoes not lower the yield and a manufacturing method thereof.

The present invention provides a semiconductor device having a so-calledSOI (silicon on insulator) structure in which a semiconductor layer overan insulating surface is used for forming an element, and ischaracterized in that the semiconductor layer and a conductive layerserving as a source or drain electrode are electrically connected toeach other with a conductive layer serving as a connecting wiringinterposed therebetween.

The semiconductor layer includes at least a channel formation regionprovided between a pair of impurity regions. The conductive layerserving as a connecting wiring is provided to be in contact with theimpurity region of the semiconductor layer. The conductive layer may beprovided over the semiconductor layer (on the side provided with a gateelectrode of the semiconductor layer) or below the semiconductor layer(on the side not provided with the gate electrode of the semiconductorlayer). The conductive layer serving as a connecting wiring is incontact with the conductive layer serving as a source or drainelectrode, whereby the conductive layer serving as a source or drainelectrode and the semiconductor layer are electrically connected to eachother. Preferably, the conductive layer serving as a connecting wiringand the conductive layer serving as a source or drain electrode are incontact with each other in a region which does not overlap with thesemiconductor layer.

According to one aspect of the present invention, a semiconductor deviceincludes a semiconductor layer overlapping with a gate electrode andhaving an impurity region outside a region which overlaps with the gateelectrode; a first conductive layer which is provided on a side providedwith the gate electrode of the semiconductor layer and partially incontact with the impurity region; an insulating layer provided over thegate electrode and the first conductive layer; and a second conductivelayer which is formed in the insulating layer and in contact with thefirst conductive layer through an opening at least part of whichoverlaps with the first conductive layer.

According to another aspect of the present invention, a semiconductordevice includes a semiconductor layer overlapping with a gate electrodeand having an impurity region outside a region which overlaps with thegate electrode; a first conductive layer which is provided on a side notprovided with the gate electrode of the semiconductor layer andpartially in contact with the impurity region; an insulating layerprovided over the gate electrode and the semiconductor layer; and asecond conductive layer which is formed in the insulating layer and incontact with the first conductive layer through an opening at least partof which overlaps with the first conductive layer.

In any of the above aspects, preferably, silicide is formed in theimpurity region and the silicide region in the impurity region and thefirst conductive layer are in contact with each other. In addition, thesilicide region preferably includes any one of nickel silicide, titaniumsilicide, cobalt silicide, and platinum silicide.

In any of the above aspects, the semiconductor layer preferably has athickness of 10 to 25 nm.

In the above aspects, the semiconductor layer may include a channelformation region formed in a region overlapping with the gate electrodeand a low-concentration impurity region doped with an impurity elementhaving the same conductivity type as that of the impurity region at alower concentration than in the impurity region between the channelformation region and the impurity region.

In the above aspects, an end portion of the first conductive layer ispreferably tapered.

By applying the present invention, electrical connection between aconductive layer and a semiconductor layer can be favorable. Therefore,it is possible to provide a highly reliable semiconductor device and amanufacturing method thereof.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are views showing an example of a main structure of asemiconductor device of the present invention.

FIGS. 2A to 2E are views showing an example of a manufacturing method ofa semiconductor device of the present invention.

FIGS. 3A to 3D are views showing an example of a manufacturing method ofa semiconductor device of the present invention.

FIGS. 4A to 4D are top views showing an example of a manufacturingmethod of a semiconductor device of the present invention.

FIGS. 5A to 5C are top views showing an example of a manufacturingmethod of a semiconductor device of the present invention.

FIGS. 6A to 6C are views showing an example of a main structure of asemiconductor device of the present invention.

FIGS. 7A to 7D are views showing an example of a manufacturing method ofa semiconductor device of the present invention.

FIGS. 8A to 8D are views showing an example of a manufacturing method ofa semiconductor device of the present invention.

FIGS. 9A to 9C are views showing an example of a main structure of asemiconductor device of the present invention.

FIGS. 10A to 10D are views showing an example of a manufacturing methodof a semiconductor device of the present invention.

FIGS. 11A to 11H are views showing examples of a usage mode of asemiconductor device of the present invention.

FIG. 12 is a view showing an example of a structure of plasma processingequipment.

FIGS. 13A and 13B are cross-sectional views showing examples of a mainstructure of a semiconductor device of the present invention.

FIG. 14 is a top view showing an example of a main structure of asemiconductor device of the present invention.

FIGS. 15A and 15B are cross-sectional views showing an example of a mainstructure of a semiconductor device of the present invention.

FIGS. 16A to 16D are views showing an example of a manufacturing methodof a semiconductor device of the present invention.

FIGS. 17A to 17D are views showing an example of a manufacturing methodof a semiconductor device of the present invention.

FIGS. 18A to 18C are views showing an example of a manufacturing methodof a semiconductor device of the present invention.

FIG. 19 is a block diagram showing an example of a semiconductor deviceof the present invention.

FIG. 20 is a perspective view showing an example of a semiconductordevice of the present invention.

FIG. 21A is a top view and FIGS. 21B and 21C are cross-sectional viewsshowing an example of a semiconductor device of the present invention.

FIGS. 22A to 22D are explanatory views of an antenna which can beapplied to a semiconductor device of the present invention.

FIG. 23A is a block diagram showing an example and FIGS. 23B and 23C areviews showing examples of a usage mode of a semiconductor device of thepresent invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiment modes of the present invention will be describedwith reference to the accompanying drawings. Note that the presentinvention is not limited to the following description, and it is easilyunderstood by those skilled in the art that modes and details thereofcan be modified in various ways without departing from the spirit andthe scope of the present invention. Therefore, the present inventionshould not be interpreted as being limited to the following descriptionof the embodiment modes. In a structure of the present invention to begiven below, the same portions or portions having similar functions maybe denoted by the same reference numerals in different drawings.

(Embodiment Mode 1)

FIG. 1A is a top view and FIGS. 1B and 1C are cross-sectional views forexplaining a main structure of a semiconductor device according to thepresent invention. FIGS. 1A to 1C particularly show a structure of athin film transistor. FIG. 1A is a top view, FIG. 1B is across-sectional view taken along a dashed line x-y in FIG. 1A, and FIG.1C is a cross-sectional view taken along a dashed line o-p in FIG. 1A.In FIG. 1A, illustration of part of a thin film and the like is omitted.Note that these drawings show only an example and the structure can bechanged as appropriate depending on a desired layout.

A semiconductor device shown in FIGS. 1A to 1C includes a thin filmtransistor provided over a substrate 100 with an insulating layer 102interposed therebetween. The thin film transistor includes anisland-shaped semiconductor layer 104, an insulating layer 112 providedover the semiconductor layer 104, a gate electrode 118 includingconductive layers 114 and 116 provided over the semiconductor layer 104with the insulating layer 112 interposed therebetween, and insulatinglayers 120 provided to be in contact with the side surfaces of theconductive layers 114 and 116. In addition, conductive layers 122 areprovided to be in contact with end portions of the semiconductor layer104, and conductive layers 126 are provided over the conductive layers122 with an insulating layer 124 interposed therebetween. The conductivelayer 122 and the conductive layer 126 are connected to each otherthrough an opening formed in the insulating layer 124. The conductivelayer 126 and the semiconductor layer 104 are electrically connected toeach other with the conductive layer 122 interposed therebetween.

The island-shaped semiconductor layer 104 includes a channel formationregion 106, a pair of impurity regions 108 serving as LDD regions, and apair of impurity regions 110 serving as source and drain regions.Hereinafter, an impurity region serving as an LDD region is referred toas a low-concentration impurity region, and an impurity region servingas a source or drain region is referred to as a high-concentrationimpurity region in this specification. In this embodiment mode,low-concentration impurity regions 108 and high-concentration impurityregions 110 are provided.

The conductive layer 122 is formed to be in contact with thehigh-concentration impurity region 110 formed in the semiconductor layer104. Preferably, the conductive layer 122 is formed to be in contactwith the end portion of the semiconductor layer 104. In addition, theconductive layer 122 is provided on the side provided with the gateelectrode 118 of the semiconductor layer 104.

The conductive layer 122 is connected to the conductive layer 126through the opening formed in the insulating layer 124. At least part ofthe opening formed in the insulating layer 124 overlaps with theconductive layer 122. The conductive layer 126 serves as a source ordrain electrode. Therefore, the conductive layer 122 serves as aconnecting wiring for electrically connecting the conductive layer 126serving as a source or drain electrode and the high-concentrationimpurity region 110 serving as a source or drain region. One feature ofthe present invention is that a conductive layer serving as a source ordrain electrode is not in contact with a semiconductor layer directly tobe connected thereto but is connected thereto with a conductive layersewing as a connecting wiring interposed therebetween. With such astructure, when an opening is formed in an insulating layer so that theconductive layer serving as a source or drain electrode is formedtherein, the semiconductor layer (high-concentration impurity region)around the opening can be prevented from being etched. In particular,when a semiconductor layer is thinned for miniaturization of elements,the structure of the present invention is very effective. Further,electrical connection (hereinafter also referred to as contact) betweenthe source or drain electrode and the semiconductor layer can be surelyobtained. Therefore, a semiconductor device completed can be highlyreliable. In addition, the semiconductor device can be manufactured withhigh yield.

The gate electrode 118 is formed of a stacked-layer structure of theconductive layers 114 and 116. The gate electrode 118 is provided so asto get across the island-shaped semiconductor layer 104. Although theexample in which the gate electrode is formed of the two-layer-stackedstructure of the conductive layers 114 and 116 is described withreference to FIGS. 1A to 1C, the present invention is not limitedthereto. For example, the gate electrode may employ a single layerstructure or a stacked-layer structure including three or more layers.Further, the side surface of the conductive layer included in the gateelectrode may be tapered. Furthermore, the gate electrode may employ astacked-layer structure including two or more conductive layers in whichthe taper angles may be different among the layers. When the gateelectrode is formed of a stacked-layer structure of conductive layers,the widths (the length in the direction parallel to a direction forcarrier flow in a channel formation region (a direction which connects asource region and a drain region)) of the layers may be almost equal toeach other, or the width of the lower conductive layer may be largerthan that of the upper conductive layer. Further, in this embodimentmode, although the insulating layers 120 called sidewalls (hereinafteralso referred to as the sidewall insulating layers 120) are formed to bein contact with the side surfaces of the conductive layers 114 and 116included in the gate electrode 118, the present invention is not limitedthereto and the sidewall insulating layers 120 may be formed as needed.

In the island-shaped semiconductor layer 104, the channel formationregion 106 is positioned between the pair of high-concentration impurityregions 110, and each of the low-concentration impurity regions 108 ispositioned between the channel formation region 106 and each of thehigh-concentration impurity regions 110. That is, the channel formationregion 106 is positioned between the pair of high-concentration impurityregions 110 and between the pair of low-concentration impurity regions108, and is in contact with the pair of low-concentration impurityregions 108. The concentration of an impurity element which imparts oneconductivity type added to the high-concentration impurity regions 110is higher than that of the low-concentration impurity regions 108. Byprovision of each of the low-concentration impurity regions 108 betweenthe channel formation region 106 and each of the high-concentrationimpurity regions 110 in the semiconductor layer 104, an electric fieldin the periphery of the drain region can be eased, and therefore,occurrence of a hot carrier can be suppressed. Occurrence of a hotcarrier causes fluctuation of the threshold voltage, which maydrastically reduce operating characteristics or reliability. Inparticular, if an element is miniaturized, i.e., the channel length (thelength in the direction parallel to a direction for carrier flow in achannel formation region (a direction which connects a source region anda drain region)) is decreased, the problem of generating a high electricfield in the periphery of the drain region becomes prominent, andtherefore, formation of the low-concentration impurity regions whichserve as LDD regions is very effective.

The thickness of the semiconductor layer 104 is 5 to 150 nm, preferably,10 to 25 nm. In this embodiment mode, the thickness of the semiconductorlayer 104 is 20 nm.

Further, the end portion of the semiconductor layer 104 may be tapered.For example, the end portion may be tapered at a taper angle of greaterthan or equal to 45° and less than 95°, preferably, at a taper angle ofgreater than or equal to 60° and less than 95°, or may be gently taperedat a taper angle of less than 45°. Note that the taper angle refers toan inclination angle formed by the side surface of a layer which istapered and the bottom surface thereof. In this embodiment mode, the endportion is tapered at a taper angle of nearly 90°.

The channel formation region 106 is formed in a region of thesemiconductor layer 104 which overlaps with the conductive layers 114and 116 included in the gate electrode 118. The gate electrode 118 isprovided over the channel formation region 106 with the insulating layer112 interposed therebetween. Note that an impurity element which impartsone conductivity type may be added to the channel formation region 106to control the threshold voltage of the transistor. Thehigh-concentration impurity region 110 is formed in a region of thesemiconductor layer 104 which does not overlap with the conductivelayers 114 and 116 included in the gate electrode 118 and the sidewallinsulating layer 120. The low-concentration impurity region 108 isformed in a region of the semiconductor layer 104 which overlaps withthe sidewall insulating layer 120. In other words, in the semiconductorlayer 104, the channel formation region 106 is formed in a region whichoverlaps with the gate electrode 118, and the impurity regions (thelow-concentration impurity region 108 and the high-concentrationimpurity region 110) are formed outside the region which overlaps withthe gate electrode 118.

In addition, here, silicide is formed in the entire high-concentrationimpurity region 110. When silicide is formed in an impurity regionserving as a source or drain region, contact resistance between asemiconductor layer and a conductive layer can be reduced. In accordancewith miniaturization of elements, a problem of increase in contactresistance becomes prominent. Therefore, achieving reduction in contactresistance by forming silicide in the impurity region is very effectiveto prevent signal delay and achieve low power consumption of asemiconductor device completed. In addition, when silicide is formed inthe impurity region serving as a source or drain region, the impurityregion can be made to have low resistance. As a result, reduction in oncurrent can be suppressed, and deterioration in operatingcharacteristics can be prevented.

Although FIGS. 1A to 1C show the example in which silicide is formed inthe entire impurity region serving as a source or drain region, thepresent invention is not limited thereto. For example, as shown in FIG.13A, a high-concentration impurity region 150 in which silicide is notformed may be formed. Alternatively, as shown in FIG. 13B, silicide maybe formed in part of a high-concentration impurity region 180.

Further, although the example in which the low-concentration impurityregions which serve as LDD regions are formed in the semiconductor layer104 is shown here, the present invention is not limited thereto, and theLDD regions are not necessarily formed. In the case where the LDDregions are not formed, it is preferable to employ a structure in whicha channel formation region is formed to be in contact with and between apair of impurity regions which serve as source and drain regions. Inthis case, when a gate electrode is formed of a single layer structureor a stacked-layer structure in which the widths of the layers arealmost equal to each other as shown in FIGS. 1A to 1C, the channelformation region is preferably formed in a region which roughly overlapswith the gate electrode and the impurity regions which serve as sourceand drain regions are preferably formed in the regions which do notoverlap with the gate electrode. Further, when a gate electrode isformed of a stacked-layer structure in which the lower conductive layerhas a width which is larger than that of the upper conductive layer, thechannel formation region is preferably formed in the region whichroughly overlaps with the upper conductive layer having a smaller widthand the impurity regions which serve as source and drain regions arepreferably formed in the regions which do not overlap with the upperconductive layer. Further, LDD regions may be formed in thesemiconductor layer either in regions which overlap with the conductivelayer included in the gate electrode or in regions which partiallyoverlap with the conductive layer included in the gate electrode.

Between the semiconductor layer 104 and the gate electrode 118 (theconductive layer 114), the insulating layer 112 is formed. Theinsulating layer 112 serves as a gate insulating layer, and itsthickness is 1 to 110 nm, preferably 2 to 20 nm. When the gateinsulating layer is thinned, the transistor can be operated at lowvoltage with high speed, which is preferable. In this embodiment mode,the insulating layer 112 is formed to have a thickness of 20 nm.

Next, an example of a method for manufacturing the semiconductor deviceshown in FIGS. 1A to 1C will be described with reference to thedrawings.

The island-shaped semiconductor layer 104 is formed over the substrate100 with the insulating layer 102 interposed therebetween (FIGS. 2A and4A).

For the substrate 100, a glass substrate, a quartz substrate, a sapphiresubstrate, a ceramic substrate, a metal substrate with an insulatinglayer formed over the surface, a semiconductor substrate such as asilicon substrate, or the like can be used.

The insulating layer 102 is formed using silicon oxide, silicon nitride,silicon oxynitride, silicon nitride oxide, or the like by a CVD method,a sputtering method, an ALD method, or the like. The insulating layer102 serves as a base insulating layer, specifically, a blocking layerthat prevents contamination of the semiconductor layer due to diffusionof an alkali metal or the like from the substrate 100 to thesemiconductor layer. In addition, when the surface of the substrate 100is uneven, the insulating layer 102 can serve as a layer forplanarization. Note that the insulating layer 102 is not necessary to beformed if impurity diffusion from the substrate 100 or unevenness of thesurface of the substrate 100 is not a problem. Further, although thebase insulating layer has a single layer structure, it may have astacked-layer structure. For example, when the base insulating layer isto have a stacked-layer structure including two layers, a siliconnitride oxide layer can be formed for the first layer and a siliconoxynitride layer can be formed for the second layer. Alternatively, asilicon nitride layer may be formed for the first layer and a siliconoxide layer may be formed for the second layer.

For the semiconductor layer 104, a single crystalline semiconductor or acrystalline semiconductor is preferably used. The semiconductor layer104 is formed to have a thickness of 5 to 150 nm, preferably, 10 to 25nm.

The island-shaped semiconductor layer 104 can be formed as follows: asemiconductor layer formed over the entire surface of the substrate 100by a CVD method or a sputtering method is crystallized and thenselectively etched. As a semiconductor material for forming thesemiconductor layer 104, a material mainly containing silicon,specifically, silicon, silicon germanium, or the like can be used. Inaddition, germanium may be used. As a crystallization method of thesemiconductor layer, a laser crystallization method, a thermalcrystallization method using rapid thermal annealing (RTA) or anannealing furnace, a crystallization method using a metal element thatpromotes crystallization, a method combining these methods, or the likecan be used.

In the case of using a laser crystallization method, a laser beamemitted from a continuous wave laser (hereinafter also referred to as aCW laser) or a pulsed wave laser (hereinafter also referred to as apulsed laser) can be used. As a laser which can be used here, a gaslaser such as an Ar laser, a Kr laser, an excimer laser, a copper vaporlaser, or a gold vapor laser; a solid-state laser such as a laser whosemedium is single-crystal YAG, YVO₄, or forsterite (Mg₂SiO₄, YAlO₃, orGdVO₄), to which one or more of Nd, Yb, Cr, Ti, Ho, Er, Tm, and Ta hasbeen added as a dopant, or polycrystalline (ceramic) YAG, Y₂O₃, YVO₄,YAlO₃, or GdVO₄, to which one or more of Nd, Yb, Cr, Ti, Ho, Er, Tm, andTa has been added as a dopant; a glass laser; an alexandrite laser; aruby laser; or a Ti:sapphire laser; or the like can be given. In thecase of using the solid-state laser, any of the fundamental wave tofourth harmonic thereof can be selected as appropriate for irradiation.For example, the second harmonic (532 nm) or the third harmonic (355 nm)of an Nd:YVO₄ laser (the fundamental wave: 1064 nm) can be used. When anNd:YVO₄ laser is used as a CW laser, a laser power density of about 0.01to 100 MW/cm² (preferably, 0.1 to 10 MW/cm²) is required, andirradiation is conducted with a scanning rate of about 10 to 2000cm/sec. Note that the second harmonic (532 nm) is preferably used here;this is because the second harmonic is superior in energy efficiency tothe harmonics higher than this.

When laser crystallization is performed using a CW laser, thesemiconductor layer continuously receives energy; therefore, once thesemiconductor layer is melted, the melted state can be continuous.Therefore, it is possible to move a solid-liquid interface of thesemiconductor layer by scanning with a CW laser beam and to form acrystal grain which is elongated in one direction along this scanningdirection. A solid-state laser is preferably used because its output isso stable that a stable process can be expected compared to a gas laseror the like. By using not only a CW laser but also a pulsed laser with arepetition rate of greater than or equal to 10 MHz, the similar effectcan be obtained. In the case of a pulsed laser with a high repetitionrate, when the pulse interval of the laser is shorter than the periodafter the semiconductor layer is melted and before the meltedsemiconductor layer is solidified, the semiconductor layer can bemaintained in a melted state at all times. Also, by movement of thesolid-liquid interface, a semiconductor layer including a crystal grainwhich is elongated in one direction can be formed. Moreover, oscillationof a laser beam with TEM₀₀ (single transverse mode) in a laseroscillator is preferable because the energy homogeneity of a linear beamspot on an irradiation surface can be improved.

The semiconductor layer 104 can be formed into an island-shape by thesteps of selectively covering the semiconductor layer formed over theentire surface of the substrate with a resist mask and etching thesemiconductor layer not covered with the resist mask. The semiconductorlayer can be etched by a dry etching method or a wet etching method. Inthe case of dry etching, an etching gas with high etching selectivity ofthe semiconductor layer with respect to the base insulating layer isused. That is, an etching gas with a low etching rate with respect tothe insulating layer 102 and a high etching rate with respect to thesemiconductor layer 104 may be used. As an etching gas, for example, achlorine-based gas such as Cl₂, BCl₃, or SiCl₄, a fluorine-based gassuch as CF₄, NF₃, or SF₆, or an HBr gas can be used. Further, an inertgas such as He, Ar, or Xe may be added as appropriate. Furthermore, anO₂ gas may be added to a fluorine-based gas as appropriate. After thesemiconductor layer is processed into a desired shape, the resist maskis removed.

The semiconductor layer 104 may be formed such that the end portion isnear-perpendicularly tapered or gently tapered. For example, the endportion may be tapered at a taper angle of greater than or equal to 45°and less than 95°, preferably, greater than or equal to 60° and lessthan 95°, or may be gently tapered at a taper angle of less than 45°.The shape of the end portion of the semiconductor layer 104 can beselected as appropriate by changing the etching condition or the like.

When the thickness of the semiconductor layer 104 is made to be lessthan or equal to 50 nm, the semiconductor layer may be thinned byetching after being formed to be greater than or equal to 50 nm thick.For example, when the semiconductor layer is thinned by a dry etchingmethod, a chlorine-based gas such as Cl₂, BCl₃, or SiCl₄, afluorine-based gas such as CF₄, NF₃, or SF₆, or an HBr gas can be used.Further, an inert gas such as He, Ar, or Xe may be added as appropriate.Furthermore, an O₂ gas may be added to a fluorine-based gas.Alternatively, the semiconductor layer is partially modified, and themodified region may be selectively etched. To modify the semiconductorlayer, for example, oxidation treatment, nitridation treatment, or thelike is performed to the semiconductor layer, and a region that isdesired to be etched may be modified by such treatment.

In this embodiment mode, a crystalline silicon layer having a thicknessof 20 nm is formed for the semiconductor layer 104.

Note that an SOI substrate provided with a single crystallinesemiconductor layer on its insulating surface may be used for thesemiconductor layer without performing various thin film fabricationprocesses using a crystallization method. In this case, thesemiconductor layer 104 can be formed using a single crystallinesemiconductor layer provided on the insulating surface.

Next, after an insulating layer 111 is formed over the semiconductorlayer 104, a conductive layer is formed over the insulating layer 111.In this embodiment mode, a stacked-layer structure of conductive layers113 and 115 is formed as the conductive layer (FIG. 2B).

The insulating layer 111 is formed of a single layer structure or astacked-layer structure using silicon oxide, silicon nitride, siliconoxynitride, silicon nitride oxide, aluminum nitride, and/or the like bya CVD method, a sputtering method, an ALD method, or the like. Thethickness of the insulating layer 111 is 1 to 110 nm, preferably, 2 to20 nm. Note that the insulating layer 111 serves as a gate insulatinglayer in a thin film transistor completed later. In this embodimentmode, a silicon oxynitride layer is formed to have a thickness of 20 nmfor the insulating layer 111.

Alternatively, the insulating layer 111 can be formed by solid phaseoxidation or solid phase nitridation by plasma treatment. For example,the semiconductor layer 104 can be oxidized or nitrided by plasmatreatment to form the insulating layer 111. When the semiconductor layer104 is oxidized or nitrided by plasma treatment, the insulating layer111 which is dense and excellent in reliability and has high withstandvoltage can be formed.

In the solid phase oxidation treatment or solid phase nitridationtreatment by plasma treatment, plasma which is excited by high-frequencywaves such as microwaves (typically, 2.45 GHz) and has an electrondensity of 1×10¹¹ to 1×10¹³ cm⁻³, inclusive, and electron temperaturesof 0.5 to 1.5 eV, inclusive, is preferably used. This is because in thesolid phase oxidation treatment or solid phase nitridation treatment attemperatures of less than or equal to 500° C., a dense insulating layeris to be formed and a practical reaction speed is to be obtained.

When the surface of the semiconductor layer 104 is oxidized by plasmatreatment, the plasma treatment is performed in an atmosphere containingoxygen (e.g., an atmosphere containing oxygen, ozone, nitrous oxide,nitrogen monoxide, or nitrogen dioxide, and a rare gas (at least one ofhelium (He), neon (Ne), argon (Ar), krypton (Kr), and xenon (Xe)), or anatmosphere containing oxygen, ozone, nitrous oxide, nitrogen monoxide,or nitrogen dioxide, hydrogen, and a rare gas). Further, when thesurface of the semiconductor layer 104 is nitrided by plasma treatment,the plasma treatment is performed in an atmosphere containing nitrogen(e.g., an atmosphere containing nitrogen and a rare gas (at least one ofHe, Ne, Ar, Kr, and Xe), an atmosphere containing nitrogen, hydrogen,and a rare gas, or an atmosphere containing NH₃ and a rare gas). As therare gas, Ar is preferably used, for example. Further, a gas in which Arand Kr are mixed may also be used.

FIG. 12 shows a structural example of plasma processing equipment 1080for performing plasma treatment. The plasma processing equipment 1080includes a support 1088, a gas supplying portion 1084 for supplying agas, an exhaust port 1086 connected to a vacuum pump for exhausting agas, an antenna 1098, a dielectric plate 1082, and a high-frequency wavesupplying portion 1092 for supplying high-frequency waves for plasmageneration. An object to be processed 1010 is held by the support 1088.In addition, by providing a temperature controller 1090 for the support1088, the temperature of the object to be processed 1010 can becontrolled. The object to be processed 1010 is a body to which plasmatreatment is performed, and corresponds to an object in which theinsulating layer 102 and the island-shaped semiconductor layer 104 arestacked in order over the substrate 100 in this embodiment mode.

Hereinafter, a specific example in which an insulating layer is formedon the surface of the semiconductor layer with the plasma processingequipment 1080 shown in FIG. 12 is described. Note that the plasmatreatment includes oxidation treatment, nitridation treatment,oxynitridation treatment, hydrogenation treatment, and surfacemodification treatment performed to a substrate, a semiconductor layer,an insulating layer, and a conductive layer. For these treatments, a gassupplied from the gas supplying portion 1084 may be selected inaccordance with an intended purpose.

First, a processing chamber of the plasma processing equipment 1080shown in FIG. 12 is made in vacuum and a gas containing a rare gas andoxygen or nitrogen is supplied from the gas supplying portion 1084. Theobject to be processed 1010 is heated at room temperature or attemperatures of 100 to 550° C., inclusive, by the temperature controller1090. The distance between the object to be processed 1010 and thedielectric plate 1082 (hereinafter also called an electrode interval) isapproximately 20 to 200 mm, inclusive (preferably 20 to 60 mm,inclusive).

Next, high-frequency waves are supplied from the high-frequency wavesupplying portion 1092 to the antenna 1098. Here, microwaves (frequency:2.45 GHz) are input as the high-frequency waves. Then, the microwavesare introduced from the antenna 1098 into the processing chamber throughthe dielectric plate 1082; thus, plasma 1094 is generated. With theplasma 1094, oxygen radicals (which may include an OH radical) ornitrogen radicals (which may include an NH radical) are generated. Atthis time, the plasma 1094 is generated from the gas supplied.

When the plasma 1094 is generated by introducing high-frequency wavessuch as microwaves, plasma which has the low electron temperature (lessthan or equal to 3 eV, preferably less than or equal to 1.5 eV) and thehigh electron density (greater than or equal to 1×10¹¹ cm⁻³) can begenerated. Specifically, plasma which has electron temperatures of 0.5to 1.5 eV, inclusive, and an electron density of 1×10¹¹ to 1×10¹³ cm⁻³,inclusive, is preferably generated. Note that in this specification,plasma which has the low electron temperature and the high electrondensity generated by introducing microwaves is also called high-densityplasma. Further, plasma treatment utilizing high-density plasma is alsocalled high-density plasma treatment.

With the oxygen radicals (which may include an OH radical) or nitrogenradicals (which may include an NH radical) generated by the plasma 1094,the surface of the semiconductor layer formed in the object to beprocessed 1010 is oxidized or nitrided, whereby an insulating layer isformed. In this case, if the rare gas such as argon is mixed in the gassupplied, oxygen radicals or nitrogen radicals can be generatedefficiently by excited species of the rare gas. Note that in the casewhere the rare gas is used in the gas supplied, the rare gas may becontained in the insulating layer formed. In this method, by effectiveuse of active radicals excited by plasma, oxidation or nitridation by asolid phase reaction can be performed at low temperatures of less thanor equal to 500° C.

As one preferable example of the insulating layer 111 formed by thehigh-density plasma treatment using the equipment shown in FIG. 12, asilicon oxide layer is formed on one surface of the semiconductor layer104 to have a thickness of 3 to 6 m by plasma treatment in an atmospherecontaining oxygen, and the surface of the silicon oxide layer is treatedwith nitridation plasma in an atmosphere containing nitrogen to form anitrogen-plasma-treated layer (silicon nitride layer). Specifically,first, the silicon oxide layer is formed on one surface of thesemiconductor layer 104 by plasma treatment in an atmosphere containingoxygen to have a thickness of 3 to 6 mm. Then continuously, the plasmatreatment in an atmosphere containing nitrogen is performed, whereby thenitrogen-plasma-treated layer with high nitrogen concentration isprovided on the one surface of the silicon oxide layer or in theperiphery of the surface. Note that the “periphery of the surface”refers to a region in a depth of approximately 0.5 to 1.5 nm from thesurface of the silicon oxide layer. For example, by performing theplasma treatment in an atmosphere containing nitrogen, a structure inwhich nitrogen is contained at 20 to 50 at. % in a region of the siliconoxide layer in a depth of approximately 1 nm from the surface thereof ina perpendicular direction is obtained. Further, the high-density plasmatreatment can also oxidize or nitride the surface of the insulatinglayer 111.

For example, by forming a silicon layer as the semiconductor layer 104and oxidizing the surface of the silicon layer with plasma treatment, anoxide layer which is not distorted at an interface and is dense can beformed. Further, by nitriding the oxide layer with plasma treatment, bywhich oxygen is substituted for nitrogen in the top surface layerportion to form a nitride layer, the insulating layer can be denser. Inthis manner, an insulating layer with a high withstand voltage can beformed.

In any case, by the solid phase oxidation treatment or solid phasenitridation treatment with plasma treatment as described above, even ifa glass substrate with an upper temperature limit of less than or equalto 700° C. is used, an insulating layer which is equivalent to athermally-oxidized film which is formed at temperatures of 950 to 1050°C. can be obtained. That is, a highly reliable insulating layer can beformed as the insulating layer that serves as a gate insulating layer ina semiconductor element, in particular, a thin film transistor or anonvolatile memory element.

As the insulating layer 111, a high dielectric constant material may beused. When a high dielectric constant material is used for theinsulating layer 111, leak current can be reduced. As the highdielectric constant material, zirconium dioxide, hafnium oxide, titaniumdioxide, tantalum pentoxide, or the like can be used. Further, after theinsulating layer is formed using the high dielectric constant material,a silicon oxide layer may be stacked by solid-phase oxidation by plasmatreatment.

Next, the conductive layers 113 and 115 are formed using a conductivematerial by a CVD method or a sputtering method. As the conductivematerial, a metal element such as tantalum (Ta), tungsten (W), titanium(Ti), molybdenum (Mo), chromium (Cr), aluminum (Al), copper (Cu), orniobium (Nb); or an alloy material or a compound material containing anyof the above metal elements can be used. Further, a semiconductormaterial typified by polycrystalline silicon to which an impurityelement which imparts one conductivity type such as phosphorus is addedcan also be used. Although an example in which a stacked-layer structureincluding the conductive layers 113 and 115 is formed is shown, theconductive layer formed over the insulating layer 111 may have a singlelayer structure. The conductive layer (the stacked-layer structureincluding the conductive layers 113 and 115) is formed to have athickness in the range of 50 to 1000 nm, preferably 100 to 800 nm, andmore preferably 200 to 500 nm.

In this embodiment mode, as the conductive layers 113 and 115, astacked-layer structure of a tantalum nitride layer having a thicknessof 30 nm and a tungsten layer having a thickness of 370 nm is formed.

Next, the conductive layers 113 and 115 are selectively etched, so thatthe conductive layers 114 and 116 constituting the gate electrode 118are formed (FIG. 2C). In addition, a region of the insulating layer 111which does not overlap with the conductive layers 114 and 116 isselectively etched, so that the insulating layer 112 is formed. Theinsulating layer 112 serves as a gate insulating layer.

The conductive layers 114 and 116 can be formed as follows: theconductive layers 113 and 115 formed over the entire surface of thesubstrate are selectively covered with a resist mask, and the conductivelayers 113 and 115 not covered with the resist mask are etched, so thata desired shape is obtained. After the etching, the resist mask isremoved.

Next, an impurity element which imparts one conductivity type isselectively added to the semiconductor layer 104 at a firstconcentration, whereby a pair of low-concentration impurity regions 107and the channel formation region 106 are formed (FIGS. 2D and 4C). Here,the impurity element is added with the conductive layers 114 and 116 asa mask so that the pair of low-concentration impurity regions 107 andthe channel formation region 106 positioned between the pair oflow-concentration impurity regions 107 are formed in a self-alignedmanner. Parts of the low-concentration impurity regions 107 formed atthis time form LDD regions later. As the impurity element which impartsone conductivity type, an element which imparts p-type conductivity suchas boron (B), aluminum (Al), or gallium (Ga) or an element which impartsn-type conductivity such as phosphorus (P) or arsenic (As) can be used.In this embodiment mode, as the impurity element, phosphorus that is anelement which imparts n-type conductivity is added to be contained at apeak concentration of about 1×10¹⁸ cm⁻³.

Next, the sidewall insulating layers 120 which are in contact with theside surfaces of the conductive layers 114 and 116 and the insulatinglayer 112 are formed (FIGS. 2E and 4D).

The sidewall insulating layers 120 are formed as follows: an insulatinglayer is formed so that a stacked-layer structure of the conductivelayers 114 and 116 and the insulating layer 112 is embedded therein, andthe insulating layer is selectively etched by anisotropic etching mainlyin a perpendicular direction. Specifically, an insulating layer with asingle layer structure or stacked-layer structure is formed using aninorganic material such as silicon oxide, silicon nitride, siliconoxynitride, or silicon nitride oxide, or an organic material such as anorganic resin by a CVD method or a sputtering method, and the insulatinglayer is selectively etched. The sidewall insulating layer 120 can beused as a doping mask when LDD regions are formed later. Further, thesidewall insulating layer 120 can be used as a mask for forming silicidewhen a silicide region is formed later.

Here, an example is shown in which the surfaces of the sidewallinsulating layers 120 which are not in contact with the side surfaces ofthe conductive layers 114 and 116 are curved. Although the shape of thesidewall insulating layers 120 is not particularly limited but thesidewall insulating layers 120 entirely cover the side surfaces of theconductive layers 114 and 116 included in the gate electrode 118. Here,the sidewall insulating layers 120 are formed to cover also the sidesurfaces of the insulating layer 112 serving as a gate insulating layerentirely. Note that part of an upper portion of the semiconductor layer104 is also etched depending on etching conditions and reduced inthickness (referred to as film reduction) in some cases.

Next, an impurity element which imparts one conductivity type isselectively added to the semiconductor layer 104 at a secondconcentration, whereby a pair of high-concentration impurity regions 109and the pair of low-concentration impurity regions 108 are formed (FIGS.2E and 4D). Here, the impurity element is added with the conductiveLayers 114 and 116 and the sidewall insulating layers 120 formed to bein contact with the side surfaces of the conductive layers 114 and 116as a mask, so that the pair of high-concentration impurity regions 109and the pair of low-concentration impurity regions 108 are formed in aself-aligned manner. The high-concentration impurity regions 109 formedat this time serve as source and drain regions, and thelow-concentration impurity regions 108 serve as LDD regions. As theimpurity element which imparts one conductivity type, an impurityelement which imparts the same conductivity type as the element which isadded for forming the above-described low-concentration impurity regions107 can be used. Note that, when the impurity elements are added, thesecond concentration is set to be higher than the first concentration.Therefore, the concentration of the impurity element in thehigh-concentration impurity regions 109 is higher than that of thelow-concentration impurity regions 108. In this embodiment mode, as theimpurity element, phosphorus which imparts n-type conductivity is addedto be contained at a peak concentration of about 1×10²¹ cm⁻³.

Next, a metal layer 130 is formed over the semiconductor layer 104 (FIG.3A). Before the metal layer 130 is formed, a region of the semiconductorlayer 104 which does not overlap with the gate electrode 118 and thesidewall insulating layers 120 is exposed. When a natural oxide film isformed on the exposed semiconductor layer 104, the natural oxide film isremoved and then the metal layer 130 is formed.

The metal layer 130 is formed using a material which reacts with thesemiconductor layer and becomes silicide, such as a metal element, e.g.,nickel, titanium, cobalt, or platinum, or an alloy material containingany of the metal elements by a sputtering method, an evaporation method,a plating method, or the like. The metal layer 130 is formed to have athickness of 1 to 50 nm, preferably, 3 to 10 nm. In this embodimentmode, a nickel layer is formed to have a thickness of 10 nm as the metallayer 130.

Next, silicide is formed in part of the semiconductor layer 104. In thisembodiment mode, silicide is formed in the high-concentration impurityregions 109 entirely from the top surface to the bottom surface to formthe high-concentration impurity regions 110 (FIGS. 3B and 5A). Note thatthe top surface is a surface of the semiconductor layer 104 on which themetal layer 130 for forming silicide is formed, and the bottom surfaceis a surface which is in contact with the insulating layer 102.

Silicide is formed when heat treatment is performed and reaction occursin a region where the semiconductor layer 104 and the metal layer 130are in contact with each other. For example, when nickel is formed asthe metal layer 130, nickel silicide is formed in the high-concentrationimpurity regions 110. Similarly, when titanium, cobalt, or platinum isformed as the metal layer 130, titanium silicide, cobalt silicide, orplatinum silicide is formed in the high-concentration impurity regions110.

Heat treatment can be performed using RTA or an annealing furnace.Specifically, heat treatment may be performed at temperatures in therange of 300 to 700° C. for 10 seconds to 1 hour, preferably 20 secondsto 30 minutes. In this embodiment mode, heat treatment is performed at500° C. for 30 seconds, so that the high-concentration impurity regions110 formed of nickel silicide are formed.

The shape, thickness, and the like of the silicide region can beselected by appropriately controlling the thickness of the metal layer130 to be reacted, temperature of heat treatment, time of heattreatment, and the like. FIGS. 1A to 1C (FIG. 3B) show an example of thehigh-concentration impurity regions 110 in which silicide is entirelyformed. However, for example, as shown in FIG. 13B, a structure may beemployed in which silicide is partially formed in the high-concentrationimpurity regions 180. In FIG. 13B, a silicide region 184 in whichsilicide is formed is formed on the top surface side of thehigh-concentration impurity region 180, and a non-silicide region 182 inwhich silicide is not formed is formed on the bottom surface side. Inaddition, FIGS. 1A to 1C show an example in which silicide is not formedin regions below the sidewall insulating layers 120, but the presentinvention is not limited thereto. Silicide may also be formed in thesemiconductor layer 104 below the sidewall insulating layers 120 (exceptthe channel formation region 106).

After silicide is formed in the semiconductor layer 104, the metal layer130 which has not reacted is removed if it remains. Specifically, themetal layer 130 formed over the sidewall insulating layers 120, the gateelectrode 118, and the insulating layer 102 is removed. If the metallayer which has not reacted also remains over the high-concentrationimpurity regions 110 in which silicide is formed, the remaining metallayer is removed. The metal layer which has not reacted can be removedby a wet etching method or a dry etching method. At this time, anetching gas or an etchant which has high etching selectivity of themetal layer which has not reacted with respect to other layers (such asthe sidewall insulating layers 120, the conductive layer 116, theinsulating layer 102, and the high-concentration impurity regions 110 inwhich silicide is formed) is used. In other words, an etching gas or anetchant which has a high etching rate with respect to the metal layerand a low etching rate with respect to other layers may be used. Forexample, when a nickel layer is formed as the metal layer 130, the metallayer 130 which has not reacted can be removed by wet etching using asolution such as sulfuric acid or nitric acid.

Through the above, the channel formation region 106, the pair oflow-concentration impurity regions 108, and the pair ofhigh-concentration impurity regions 110 are formed in the semiconductorlayer 104. The channel formation region 106 is positioned between thepair of high-concentration impurity regions 110, and each of thelow-concentration impurity regions 108 is formed to be in contact withand between each of the high-concentration impurity regions 110 and thechannel formation region 106. The channel formation region 106 is formedin a region of the semiconductor layer 104 which overlaps with the gateelectrode 118 (the conductive layers 114 and 116). The low-concentrationimpurity region 108 is formed in a region of the semiconductor layer 104which overlaps with the sidewall insulating layer 120 but does notoverlap with the gate electrode 118. The high-concentration impurityregion 110 is formed in a region of the semiconductor layer 104 whichdoes not overlap with the gate electrode 118 and the sidewall insulatinglayer 120.

Further, in order to control the threshold voltage of a transistor, animpurity element which imparts one conductivity type may be added to thechannel formation region 106. By addition of the impurity element at acertain concentration to the channel formation region 106, the thresholdvoltage of a transistor can be shifted forcibly to a desired thresholdvoltage. As the impurity element which imparts one conductivity type, anelement which imparts p-type conductivity such as boron (B), aluminum(Al), or gallium (Ga) or an element which imparts n-type conductivitysuch as phosphorus (P) or arsenic (As) can be used. The element whichimparts p-type conductivity can be used in this embodiment mode, and forexample, boron can be added so as to be contained at concentrations ofabout 1×10¹⁶ to 1×10¹⁸ cm⁻³, inclusive, Note that addition of theimpurity element to the channel formation region 106 may be performedbefore the gate electrode 118 is formed.

Further, after the impurity element which imparts one conductivity typeis added to the semiconductor layer 104, heal treatment is preferablyperformed to activate the impurity element added. The heat treatment canbe performed by laser beam irradiation, RTA, or using an annealingfurnace. Specifically, the heat treatment may be performed attemperatures of 400 to 700° C., preferably 500 to 650° C. Further, theheat treatment is preferably performed in a nitrogen atmosphere. Forexample, activation can be performed by heating at 550° C. for 4 hours.

Next, the conductive layers 122 are formed to be in contact with thehigh-concentration impurity regions 110 (FIGS. 3C and 5B). Theconductive layers 122 are formed on the side provided with the gateelectrode 118 of the semiconductor layer 104. It is preferable that theconductive layers 122 be formed so as to partially cover the endportions of the semiconductor layer 104. Each of the conductive layers122 preferably has a region which overlaps with the semiconductor layer104 (the high-concentration impurity region 110) and a region which doesnot overlap with the semiconductor layer 104 (the high-concentrationimpurity region 110).

The conductive layers 122 are formed by the steps of forming aconductive layer to have a single layer structure or a stacked-layerstructure using a conductive material by a CVD method or a sputteringmethod and etching the conductive layer selectively. As the conductivematerial, a metal element such as titanium (Ti), tantalum (Ta), tungsten(W), or molybdenum (Mo), or an alloy material or a compound materialcontaining any of the above metal elements can be used. Preferably, aconductive material whose melting point is greater than or equal to 600°C. and resistance is low is used. The conductive layers 122 are formedto have a thickness of 10 to 200 nm.

The conductive layers 122 can be processed into a desired shape bycovering the conductive layer formed over the entire surface of thesubstrate with a resist mask selectively and etching the conductivelayer not covered with the resist mask. The conductive layer can beetched by a dry etching method or a wet etching method. An etching gasor an etchant which has high etching selectivity of the conductivelayers 122 with respect to other layers (such as the high-concentrationimpurity regions 110 in which silicide is formed, the insulating layers120, the gate electrode 118, and the insulating layer 102) is used. Inother words, an etching gas or an etchant which has a high etching ratewith respect to the conductive layers 122 and a low etching rate withrespect to other layers may be used. For example, when nickel silicideis formed in the high-concentration impurity regions 110 and a titaniumlayer is formed for the conductive layers 122, wet etching using asolution such as hydrogen fluoride can be performed. In this embodimentmode, a titanium layer with a thickness of 100 nm is formed for theconductive layers 122.

Next, the insulating layer 124 is formed so as to cover the insulatinglayer, conductive layer, and the like provided over the substrate 100.Then, after openings which reach the conductive layers 122 are formed inthe insulating layer 124, the conductive layers 126 are formed in theopenings and over the insulating layer 124 (FIGS. 3D and 5C).

The conductive layers 126 serve as source and drain electrodes. Theconductive layers 126 are in contact with and connected to theconductive layers 122 through the openings formed in the insulatinglayer 124. The conductive layers 122 are in contact with thehigh-concentration impurity regions 110. Therefore, the conductivelayers 126 serving as source and drain electrodes are electricallyconnected to the high-concentration impurity regions 110 serving assource and drain regions with the conductive layers 122 serving asconnecting wirings interposed therebetween.

The insulating layer 124 is formed by a CVD method, a sputtering method,an ALD method, or a coating method, or by combination of insulatinglayers formed by these methods to have a single layer structure or astacked-layer structure. For example, the insulating layer 124 is formedusing an inorganic insulating material such as silicon oxide, siliconnitride, silicon oxynitride, or silicon nitride oxide; or an insulatingmaterial containing carbon such as DLC (diamond-like carbon) by a CVDmethod, a sputtering method, or an ALD method. Further, the insulatinglayer 124 can be formed using an organic insulating material such asepoxy, polyimide, polyamide, polyvinyl phenol, benzocyclobutene, oracrylic; or a siloxane material such as a siloxane resin by a coatingmethod. Note that the siloxane material corresponds to a material havingSi—O—Si bonds. Siloxane includes a skeleton structure of a bond ofsilicon (Si) and oxygen (O). As a substituent, an organic groupcontaining at least hydrogen (such as an alkyl group or aromatichydrocarbon) is used. Alternatively, a fluoro group, or a fluoro groupand an organic group containing at least hydrogen can be used as asubstituent. Further, the insulating layer 124 may also be formed byforming an insulating layer by a CVD method, a sputtering method, an ALDmethod, or the like and then performing high-density plasma treatmentthereto in an oxygen atmosphere or a nitrogen atmosphere. Although theinsulating layer 124 of a single layer structure is formed over the gateelectrode 118 and the like here, a stacked-layer structure including twoor more layers may be employed. When the insulating layer has astacked-layer structure, the insulating layer in a lower layer (on theside in contact with the gate electrode and the like) is preferablyformed using an inorganic insulating material.

The opening formed in the insulating layer 124 is formed so that atleast part thereof overlaps with the conductive layer 122. For example,the insulating layer 124 is selectively covered with a resist mask, andregions not covered with the resist mask are etched to form theopenings. Although the openings can be formed by a wet etching method,it is preferable to employ a dry etching method. Further, after theopenings are formed by dry etching, wet etching may be performed toremove a reaction product or the like. After formation of the openings,the resist mask is removed. Alternatively, ablation is utilized, so thatthe openings may be directly formed by irradiating the insulating layer124 with a laser beam selectively.

Note that the openings are formed in the insulating layer 124 so thatthe conductive layers 122 are exposed at the bottom of the openings.Parts of the conductive layers 122 are etched in some cases, but theconductive layers 122 are made to remain at least at the bottom of theopenings. Preferably, the openings are formed so as to reach regionswhere the conductive layers 122 do not overlap with the semiconductorlayer 104. With such a structure, when the openings in which theconductive layers 126 are formed are formed in the insulating layer 124,the semiconductor layer (particularly the high-concentration impurityregions serving as source and drain regions) around the openings can beprevented from being removed. Therefore, yield in the manufacturingprocess can be improved.

The conductive layers 126 which forms source and drain electrodes areformed by a CVD method or a sputtering method using a conductivematerial such as a metal element, e.g., aluminum (Al), tungsten (W),titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel (Ni), platinum(Pt), copper (Cu), gold (Au), silver (Ag), manganese (Mg), or neodymium(Nd), or an alloy material or a compound material containing any of theabove metal elements, to have a single layer structure or astacked-layer structure. As examples of an alloy material containingaluminum, an alloy material containing aluminum as its main componentand nickel and an alloy material containing aluminum as its maincomponent, nickel, and at least one of carbon and silicon can be given.The conductive layers 126 can employ, for example, a stacked-layerstructure of a barrier layer, an aluminum-silicon (Al—Si) layer, and abarrier layer, or a stacked-layer structure of a barrier layer, analuminum-silicon (Al—Si) layer, a titanium nitride layer, and a barrierlayer. Note that a barrier layer corresponds to a thin film formed oftitanium, nitride of titanium, molybdenum, or nitride of molybdenum.Aluminum and aluminum silicon which have low resistance and areinexpensive are suitable for forming the conductive layers 126. Further,generation of a hillock of aluminum or aluminum silicon can be preventedwhen upper and lower barrier layers are provided. The conductive layers126 are preferably formed to have a thickness of 200 to 1000 nm. Whennatural oxide films are formed at the bottom of the openings formed inthe insulating layer 124, the natural oxide films are removed, and thenthe conductive layers 126 are formed.

In this embodiment mode, as the conductive layers 126, a stacked-layerstructure of a titanium layer with a thickness of 60 nm, a titaniumnitride layer with a thickness of 40 nm, an aluminum layer with athickness of 300 nm, and a titanium layer with a thickness of 100 nm isformed.

The conductive layers 126 are formed in the openings formed in theinsulating layer 124. At the bottom of the openings formed in theinsulating layer 124, the conductive layers 122 are exposed, and theconductive layers 126 reach the conductive layers 122 exposed. Theconductive layers 122 are in contact with the high-concentrationimpurity regions 110. Therefore, the conductive layers 126 areelectrically connected to the high-concentration impurity regions 110with the conductive layers 122 interposed therebetween. With such astructure, contact between the conductive layers serving as source anddrain electrodes and the impurity regions serving as source and drainregions can be favorable. Accordingly, reliability of a semiconductordevice completed can be improved.

In this embodiment mode, silicide is formed in the high-concentrationimpurity regions 110, and the conductive layers 122 are formed to be incontact with the high-concentration impurity regions 110 in whichsilicide is formed. Therefore, contact resistance between the conductivelayers and the semiconductor layer can be reduced. As a result,deterioration of operating characteristics of the semiconductor devicedue to reduction in on current can be prevented.

Through the above, a thin film transistor can be formed. Note that thestructure of the transistor shown in this embodiment mode is only anexample and the present invention is not limited to the illustratedstructure.

For example, the transistor can have the structure shown in FIG. 13A asdescribed above. In the thin film transistor shown in FIG. 13A, silicideis not formed in the high-concentration impurity regions 150 formed inthe semiconductor layer 104. In this transistor, the conductive layers122, the insulating layer 124, and the conductive layers 126 may beformed by the manufacturing method shown in FIGS. 2A to 5C withoutforming silicide in the semiconductor layer 104. When silicide is notformed in the semiconductor layer, the sidewall insulating layers thatare in contact with the side surfaces of the gate electrode are notrequired to be provided.

In the structure of the transistor shown in FIG. 13B, thehigh-concentration impurity regions 180 formed in the semiconductorlayer 104 each have a silicide region and a non-silicide region. Thistransistor can be formed by appropriately selecting the thickness of ametal layer formed, temperature and time of heat treatment, and the likein formation of silicide in the manufacturing method shown in FIGS. 2Ato 5C. The conductive layers 122, the insulating layer 124, and theconductive layers 126 can be formed similarly to the above.

By applying the present invention, electrical connection between theconductive layer and the semiconductor layer can be favorable, so thatreliability of the semiconductor device can be improved. In addition,since damage to the semiconductor layer in formation of the opening canbe prevented, the semiconductor device can be formed with high yield.

This embodiment mode can be combined with other embodiment modes in thisspecification as appropriate.

(Embodiment Mode 2)

This embodiment mode will describe an example of a semiconductor devicehaving a different structure from that in the preceding embodiment modewith reference to the drawings. Note that explanation of the samestructure as that in Embodiment Mode 1 is simplified or partiallyomitted.

FIG. 6A is a top view and FIGS. 6B and 6C are cross-sectional views forexplaining a main structure of a semiconductor device according to thisembodiment mode. FIGS. 6A to 6C particularly show a structure of a thinfilm transistor. FIG. 6A is a top view, FIG. 6B is a cross-sectionalview taken along a dashed line x-y in FIG. 6A, and FIG. 6C is across-sectional view taken along a dashed line o-p in FIG. 6A. In FIG.6A, illustration of part of a thin film and the like is omitted. Notethat these drawings show only an example and the structure can bechanged as appropriate depending on a desired layout.

A semiconductor device shown in FIGS. 6A to 6C includes a thin filmtransistor provided over a substrate 200 with an insulating layer 202interposed therebetween. The thin film transistor includes conductivelayers 222 provided over the insulating layer 202, an island-shapedsemiconductor layer 204 which is provided thereon to be partially incontact with the conductive layers 222, an insulating layer 212 providedover the semiconductor layer 204, a gate electrode 218 includingconductive layers 214 and 216 provided over the semiconductor layer 204with the insulating layer 212 interposed therebetween, and insulatinglayers 220 provided to be in contact with the side surfaces of theconductive layers 214 and 216. In addition, an insulating layer 224 isprovided to cover the semiconductor layer 204, the conductive layer 216,and the like, and openings which reach the conductive layers 222 areformed in the insulating layer 224. Conductive layers 226 are formed inthe openings formed in the insulating layer 224, and the conductivelayers 226 are in contact with the conductive layers 222 through theopenings. The conductive layers 226 and the semiconductor layer 204 areelectrically connected to each other with the conductive layers 222interposed therebetween.

The island-shaped semiconductor layer 204 includes a channel formationregion 206, a pair of low-concentration impurity regions 208 serving asLDD regions, and a pair of high-concentration impurity regions 210serving as source and drain regions.

The conductive layers 222 are provided over the substrate 200 with theinsulating layer 202 interposed therebetween. That is, the conductivelayers 222 are provided on the side not provided with the gate electrode218 of the semiconductor layer 204. The conductive layers 222 arepartially covered with the high-concentration impurity regions 210formed in the semiconductor layer 204, End portions of the conductivelayers 222 are preferably tapered. For example, the conductive layers222 are preferably gently tapered at a taper angle of about 20 to 60°.When the end portions of the conductive layers 222 are gently tapered,coverage defects such as disconnection of the semiconductor layer 204which partially covers the conductive layers 222 can be prevented.

The conductive layers 222 are connected to the conductive layers 226through the openings formed in the insulating layer 224. At least partof the opening formed in the insulating layer 224 overlaps with theconductive layer 222. The conductive layers 226 serve as source anddrain electrodes. Therefore, each of the conductive layers 222 serves asa connecting wiring for electrically connecting the conductive layer 226serving as a source or drain electrode and the high-concentrationimpurity region 210 serving as a source or drain region. One feature ofthe present invention is that a conductive layer serving as a source ordrain electrode is not directly in contact with a semiconductor layer tobe connected thereto but is connected thereto with a conductive layerserving as a connecting wiring interposed therebetween. With such astructure, favorable contact between the source or drain electrode andthe semiconductor layer can be obtained. Therefore, reliability of thesemiconductor device can be improved. Although the conductive layer 222has a region which overlaps with the semiconductor layer 204 and aregion which does not overlap with the semiconductor layer 204, theconductive layer 226 may be in contact with either of the regions.

The gate electrode 218 is formed of a stacked-layer structure of theconductive layers 214 and 216. The gate electrode 218 is provided so asto get across the island-shaped semiconductor layer 204. Although theexample in which the gate electrode is formed of the two-layer-stackedstructure of the conductive layers 214 and 216 and the width of thelower conductive layer 214 is larger than that of the upper conductivelayer 216 is described with reference to FIGS. 6A to 6C, the presentinvention is not limited thereto. For example, the gate electrode mayemploy a single layer structure or a stacked-layer structure includingthree or more layers. Further, the side surface of the conductive layerincluded in the gate electrode may be tapered. Furthermore, the gateelectrode may employ a stacked-layer structure including two or moreconductive layers in which the taper angles may be different among thelayers. When the gate electrode is formed of a stacked-layer structureof conductive layers, the widths (the length in the direction parallelto a direction for carrier flow in a channel formation region (adirection which connects a source region and a drain region)) of thelayers may also be almost equal to each other. Further, in thisembodiment mode, although the sidewall insulating layers 220 are formedto be in contact with the side surfaces of the conductive layers 214 and216 included in the gate electrode 218, the present invention is notlimited thereto and the sidewall insulating layers 220 may be formed asneeded.

In the island-shaped semiconductor layer 204, the channel formationregion 206 is positioned between the pair of high-concentration impurityregions 210, and each of the low-concentration impurity regions 208 ispositioned between the channel formation region 206 and each of thehigh-concentration impurity regions 210. That is, the channel formationregion 206 is positioned between the pair of high-concentration impurityregions 210 and between the pair of low-concentration impurity regions208, and is in contact with the pair of low-concentration impurityregions 208. The concentration of an impurity element which imparts oneconductivity type added to the high-concentration impurity regions 210is higher than that of the low-concentration impurity regions 208. Byprovision of each of the low-concentration impurity regions 208 betweenthe channel formation region 206 and each of the high-concentrationimpurity regions 210 in the semiconductor layer 204, an electric fieldin the periphery of the drain region can be eased, and therefore,occurrence of a hot carrier can be suppressed. Occurrence of a hotcarrier causes fluctuation of the threshold voltage, which maydrastically reduce operating characteristics or reliability. Inparticular, if an element is miniaturized, i.e., the channel length (thelength in the direction parallel to a direction for carrier flow in achannel formation region (a direction which connects a source region anda drain region)) is decreased, the problem of generating a high electricfield in the periphery of the drain region becomes prominent, andtherefore, formation of the low-concentration impurity regions whichserve as LDD regions is very effective.

The thickness of the semiconductor layer 204 is 5 to 150 nm, preferably,10 to 25 nm. In this embodiment mode, the thickness of the semiconductorlayer 204 is 20 nm.

Further, the end portion of the semiconductor layer 204 may be tapered.For example, the end portion may be tapered at a taper angle of greaterthan or equal to 45° and less than 95°, preferably, at a taper angle ofgreater than or equal to 60° and less than 95°, or may be gently taperedat a taper angle of less than 45°. Note that the taper angle refers toan inclination angle formed by the side surface of a layer which istapered and the bottom surface thereof. In this embodiment mode, the endportion is tapered at a taper angle of nearly 90°.

The channel formation region 206 is formed in a region of thesemiconductor layer 204 which overlaps with the conductive layer 216included in the gate electrode 218. The high-concentration impurityregion 210 is formed in a region of the semiconductor layer 204 whichdoes not overlap with the conductive layers 214 and 216 included in thegate electrode 218. The low-concentration impurity region 208 is formedin a region of the semiconductor layer 204 which overlaps with theconductive layer 214 included in the gate electrode 218. In other words,in the semiconductor layer 204, the channel formation region 206 isformed in a region which overlaps with the conductive layer 216 includedin the gate electrode 218, and the low-concentration impurity regions208 and the high-concentration impurity regions 210 are formed outsidethe region which overlaps with the conductive layer 216 included in thegate electrode 218.

An impurity element which imparts one conductivity type may be added tothe channel formation region 206 to control the threshold voltage of thetransistor. Although this embodiment mode shows an example in which thelow-concentration impurity regions serving as LDD regions are formed inthe semiconductor layer 204, the present invention is not limitedthereto, and the LDD regions are not required to be formed. When the LDDregions are not formed, the semiconductor layer may have a structure inwhich the channel formation region is provided to be in contact with andbetween a pair of the impurity regions serving as source and drainregions. When the gate electrode has a stacked-layer structure in whichthe width of the lower conductive layer is made larger as shown in FIGS.6A to 6C, the channel formation region may be formed so as to roughlyoverlap with the upper conductive layer with a smaller width, and theimpurity regions serving as source and drain regions may be formed inregions which do not overlap with the upper conductive layer;alternatively, the channel formation region may be formed in a regionwhich roughly overlaps with the lower conductive layer, and the impurityregions serving as source and drain regions may be formed in regionswhich do not overlap with the lower conductive layer. Further, when thegate electrode has a single layer structure or a stacked-layer structurein which the width of each conductive layer is almost the same, thechannel formation region may be formed so as to roughly overlap with thegate electrode, and the impurity regions serving as source and drainregions may be formed in regions which do not overlap with the gateelectrode. The LDD regions may be formed in the semiconductor layer inregions which overlap with the sidewall insulating layers and do notoverlap with the gate electrode, or in regions which partially overlapwith the gate electrode.

The high-concentration impurity region 210 has a region 213 in whichsilicide is formed (hereinafter also referred to as a silicide region213) and a region 209 in which silicide is not formed (hereinafter alsoreferred to as a non-silicide region 209). The non-silicide region 209is placed in a region which roughly overlaps with the sidewallinsulating layer 220. Silicide is formed in the entire silicide region213. When silicide is formed at least in a region of thehigh-concentration impurity region 210 which is in contact with theconductive layer 222, contact resistance can be reduced. Therefore, itis possible to prevent signal delay and achieve low power consumption ofthe semiconductor device completed. In addition, when silicide is formedin the impurity regions serving as source and drain regions, theimpurity regions can have low resistance. As a result, reduction in oncurrent can be suppressed, and deterioration in operatingcharacteristics can be prevented.

Although FIGS. 6A to 6C show an example in which silicide is entirelyformed in the region of the high-concentration impurity region 210 whichdoes not overlap with the sidewall insulating layer 220, the presentinvention is not limited thereto. Silicide is not required to be formedin the high-concentration impurity region, or silicide may be formedonly in part of an upper surface thereof.

Between the semiconductor layer 204 and the gate electrode 218 (theconductive layer 214), the insulating layer 212 is formed. Theinsulating layer 212 serves as a gate insulating layer, and itsthickness is 1 to 110 nm, preferably 2 to 20 nm. When the gateinsulating layer is thinned, the transistor can be operated at lowvoltage with high speed, which is preferable. In this embodiment mode,the insulating layer 212 is formed to have a thickness of 20 nm.

Next, an example of a method for manufacturing the semiconductor deviceshown in FIGS. 6A to 6C will be described with reference to thedrawings.

A conductive layer 221 is formed over the substrate 200 with theinsulating layer 202 interposed therebetween (FIG. 7A). The substrate200 and the insulating layer 202 are formed based on the description ofthe substrate 100 and the insulating layer 102 in Embodiment Mode 1 andthus the description thereof is omitted.

The conductive layer 221 is formed of a single layer structure or astacked-layer structure using a conductive material by a CVD method or asputtering method. As the conductive material, a metal element such astitanium (Ti), tantalum (Ta), tungsten (W), or molybdenum (Mo), or analloy material or a compound material containing any of the above metalelements can be used. Preferably, a conductive material whose meltingpoint is greater than or equal to 1500° C. and resistance is low isused. The conductive layer 221 is formed to have a thickness of 10 to200 nm. In this embodiment mode, a tungsten layer with a thickness of 50nm is formed for the conductive layer 221.

Next, the conductive layer 221 is selectively etched, so that theconductive layers 222 having a desired shape are formed (FIG. 7B).

The conductive layer 222 can be processed into a desired shape bycovering the conductive layer 221 formed over the entire surface of thesubstrate with a resist mask selectively and etching the conductivelayer 221 not covered with the resist mask. The conductive layer 221 maybe etched by a dry etching method or a wet etching method. An etchinggas or an etchant which has high etching selectivity of the conductivelayer 222 (the conductive layer 221) with respect to the insulatinglayer 202 is used. In other words, an etching gas or an etchant whichhas a high etching rate with respect to the conductive layer 222 (theconductive layer 221) and a low etching rate with respect to theinsulating layer 202 may be used. Preferably, a dry etching method isperformed so that each of the end portions of the conductive layer 222is tapered.

Next, the island-shaped semiconductor layer 204 is formed so as to coverthe insulating layer 202 and the conductive layers 222 partially (FIG.7C).

For the semiconductor layer 204, a single crystalline semiconductor or acrystalline semiconductor is preferably used. The semiconductor layer204 is formed to have a thickness of 5 to 150 nm, preferably, 10 to 25nm. The detailed description of crystallization and the like of thesemiconductor layer is based on the description of the semiconductorlayer 104 shown in Embodiment Mode 1. It is preferable to use lasercrystallization using a CW laser or a pulsed laser with a repetitionrate of greater than or equal to 10 MHz since crystal grains which areelongated in one direction can be formed.

The island-shaped semiconductor layer 204 can be formed as follows: asemiconductor layer formed over the insulating layer 202 to cover theconductive layers 222 by a CVD method or a sputtering method iscrystallized and then selectively etched. The island-shapedsemiconductor layer 204 is formed so as to cover parts of the conductivelayers 222, e.g., the end portions of the conductive layers 222. Whenthe end portions of the conductive layers 222 are gently tapered,disconnection of the semiconductor layer 204 provided thereover can beprevented. When the thickness of the semiconductor layer 204 is made tobe less than or equal to 50 nm, the semiconductor layer may be thinnedby etching after being formed to be greater than or equal to 50 nmthick. For the semiconductor layer, a single crystalline semiconductorlayer of an SOI substrate may also be used. In that case, thin filmprocess such as crystallization can be omitted.

In this embodiment mode, a crystalline silicon layer with a thickness of20 nm is formed for the semiconductor layer 204.

Next, after an insulating layer 211 is formed over the semiconductorlayer 204, the gate electrode 218 is formed over the insulating layer211 (FIG. 7D). The gate electrode 218 is formed of a stacked-layerstructure of the conductive layers 214 and 216 in which the width of theconductive layer 214 in the lower layer is made larger than that of theconductive layer 216 in the upper layer.

The insulating layer 211 is formed by a CVD method, a sputtering method,an ALD method, high-density plasma treatment, or the like, using siliconoxide, silicon nitride, silicon oxynitride, silicon nitride oxide,aluminum nitride, and/or the like to have a single layer structure orstacked-layer structure. The insulating layer 211 may be formedsimilarly to the insulating layer 111 shown in Embodiment Mode 1 andthus the detailed description thereof is omitted. The insulating layer211 is formed to have a thickness of 1 to 110 nm, preferably 2 to 20 nm.Part of the insulating layer 211 serves as a gate insulating layer of athin film transistor completed later. In this embodiment mode, theinsulating layer 211 is formed of a silicon oxynitride layer with athickness of 20 nm.

The conductive layers 214 and 216 can be each formed as follows: aconductive layer is formed over the entire surface of the substrateusing a conductive material by a CVD method or a sputtering method andthen selectively etched into a desired shape. As the conductivematerial, a metal element such as tantalum (Ta), tungsten (W), titanium(Ti), molybdenum (Mo), chromium (Cr), aluminum (Al), copper (Cu), orniobium (Nb); or an alloy material or a compound material containing anyof the metal elements can be used. Further, a semiconductor materialtypified by polycrystalline silicon to which an impurity element whichimparts one conductivity type such as phosphorus is added can also beused. Although the example in which a stacked-layer structure includingthe conductive layers 214 and 216 is formed is shown, the conductivelayer formed over the insulating layer 211 may have a single layerstructure. Further, the example in which the width of the conductivelayer 214 in the lower layer is made larger than that of the conductivelayer 216 in the upper layer is shown; however, the both upper and lowerlayers may have roughly the same width. In this embodiment mode, thelower conductive layer with a larger width serves as a doping mask whenthe LDD regions are formed later. The conductive layer (thestacked-layer structure including the conductive layers 214 and 216) isformed to have a thickness in the range of 50 to 1000 nm, preferably 100to 800 nm, and more preferably 200 to 500 nm.

Next, an impurity element which imparts one conductivity type isselectively added to the semiconductor layer 204 at a firstconcentration, whereby a pair of low-concentration impurity regions 207and the channel formation region 206 are formed (FIG. 8A). Here, theimpurity element is added with the conductive layer 216 as a mask, sothat the pair of low-concentration impurity regions 207 and the channelformation region 206 positioned between the pair of low-concentrationimpurity regions 207 are formed in a self-aligned manner. The endportions of the channel formation region 206 and the end portions of theconductive layer 216 are roughly in alignment. Parts of thelow-concentration impurity regions 207 formed at this time form LDDregions later. As the impurity element which imparts one conductivitytype, an element which imparts p-type conductivity such as boron (B),aluminum (Al), or gallium (Ga) or an element which imparts n-typeconductivity such as phosphorus (P) or arsenic (As) can be used. In thisembodiment mode, as the impurity element, phosphorus that is an elementwhich imparts n-type conductivity is added to be contained at a peakconcentration of about 1×10¹⁸ cm⁻³.

Next, an impurity element which imparts one conductivity type isselectively added to the semiconductor layer 204 at a secondconcentration, whereby a pair of high-concentration impurity regions 205and the pair of low-concentration impurity regions 208 are formed (FIG.8B). Here, the impurity element is added with the conductive layer 214as a mask, so that the pair of high-concentration impurity regions 205and the pair of low-concentration impurity regions 208 are formed in aself-aligned manner. The high-concentration impurity regions 205 formedat this time serve as source and drain regions, and thelow-concentration impurity regions 208 serve as LDD regions. As theimpurity element which imparts one conductivity type, an impurityelement which imparts the same conductivity type as the element which isadded for forming the above-described low-concentration impurity regions207 can be used. Note that, when the impurity element is added, thesecond concentration is set to be higher than the first concentration.Therefore, the concentration of the impurity element in thehigh-concentration impurity regions 205 is higher than that of thelow-concentration impurity regions 208. In this embodiment mode, as theimpurity element, phosphorus that is an element which imparts n-typeconductivity is added to be contained at a peak concentration of about1×10²¹ cm⁻³.

Further, in order to control the threshold voltage of a transistor, animpurity element which imparts one conductivity type may be added to thechannel formation region 206. By addition of the impurity element at acertain concentration to the channel formation region 206, the thresholdvoltage of a transistor can be shifted forcibly to a desired thresholdvoltage. As the impurity element which imparts one conductivity type, anelement which imparts p-type conductivity such as boron (B), aluminum(Al), or gallium (Ga) or an element which imparts n-type conductivitysuch as phosphorus (P) or arsenic (As) can be used. The element whichimparts p-type conductivity can be used in this embodiment mode, and forexample, boron can be added so as to be contained at concentrations ofabout 1×10¹⁶ to 1×10¹⁸ cm⁻³, inclusive. Note that addition of theimpurity element to the channel formation region 206 may be performedbefore the gate electrode 218 is formed.

Further, after the impurity element which imparts one conductivity typeis added to the semiconductor layer 204, heat treatment is preferablyperformed to activate the impurity element added. The heat treatment canbe performed by laser beam irradiation, RTA, or using an annealingfurnace. Specifically, the heat treatment may be performed attemperatures of 400 to 700° C., preferably 500 to 650° C. Further, theheat treatment is preferably performed in a nitrogen atmosphere. Forexample, activation can be performed by heating at 550° C. for 4 hours.

Next, the sidewall insulating layers 220 which are in contact with theside surfaces of the conductive layers 214 and 216 are formed (FIG. 8C).

The sidewall insulating layers 220 are formed as follows: an insulatinglayer is formed so that a stacked-layer structure of the conductivelayers 214 and 216 is embedded therein, and the insulating layer isselectively etched by anisotropic etching mainly in a perpendiculardirection. Specifically, an insulating layer with a single layerstructure or a stacked-layer structure is formed using an inorganicmaterial such as silicon oxide, silicon nitride, silicon oxynitride, orsilicon nitride oxide, or an organic material such as an organic resinby a CVD method or a sputtering method, and the insulating layer isselectively etched. The sidewall insulating layer 220 can be used as amask for forming silicide when a silicide region is formed.

Here, an example is shown in which the surfaces of the sidewallinsulating layers 220 which are not in contact with the side surfaces ofthe conductive layers 214 and 216 are curved. Although the shape of thesidewall insulating layers 220 is not particularly limited but thesidewall insulating layers 220 entirely cover at least the side surfacesof the conductive layers 214 and 216 included in the gate electrode 218.Here, the insulating layer 211 in the lower layer is also etched whenthe sidewall insulating layer 220 is formed, and part of thesemiconductor layer 204 is selectively exposed. Specifically, thehigh-concentration impurity regions 205 in regions which do not overlapwith the sidewall insulating layers 220 are exposed. Note that an upperportion of each of the high-concentration impurity regions 205 is alsoetched depending on etching conditions and reduced in thickness(referred to as film reduction) in some cases.

Next, a metal layer is formed over the semiconductor layer 204 which isexposed, and then, the high-concentration impurity regions 210 in whichsilicide is partially formed by heat treatment are formed (FIG. 8C). Thehigh-concentration impurity regions 210 each have the silicide region213 and the non-silicide region 209.

Silicide can be formed in the high-concentration impurity regions 210 byheat treatment after the metal layer is formed to be in contact with atleast the semiconductor layer 204 exposed. The metal layer is formedusing a material which reacts with the semiconductor layer and becomessilicide, such as a metal element, e.g., nickel, titanium, cobalt, orplatinum, or an alloy material containing any of the above metalelements by a sputtering method, an evaporation method, a platingmethod, or the like, Note that in formation of the metal layer, when anatural oxide film is formed on the semiconductor layer exposed, thenatural oxide film is removed, and then the metal layer is formed. Inthis embodiment mode, a nickel layer with a thickness of 10 nm is formedas the metal layer.

Heat treatment can be performed using RTA or an annealing furnace.Specifically, heat treatment may be performed at temperatures in therange of 300 to 700° C. for 10 seconds to 1 hour, preferably 20 secondsto 30 minutes. By heat treatment, reaction occurs in a region where thesemiconductor layer 204 and the metal layer are in contact with eachother, and silicide is formed in part of the semiconductor layer 204 inthis region, so that the silicide region 213 is formed. In thehigh-concentration impurity region 210, a region which does not overlapwith the sidewall insulating layer 220 is to be the silicide region 213in which silicide is entirely formed from the upper surface to thebottom surface and a region which overlaps with the sidewall insulatinglayer 220 is to be the non-silicide region 209 in which silicide is notformed. In this embodiment mode, heat treatment is performed at 500° C.for 30 seconds, so that the high-concentration impurity region 210including the nickel silicide region 213 and the non-silicide region 209is formed.

The shape, thickness, and the like of the silicide region can beselected by appropriately controlling the thickness of the metal layerto be reacted, temperature of heat treatment, time of heat treatment,and the like. FIGS. 6A to 6C (FIG. 8C) show an example in which silicideis entirely formed in a region of the high-concentration impurity region210 which does not overlap with the sidewall insulating layer 220.However, the present invention is not limited thereto, and a structurein which silicide is not formed may be employed. In addition, an examplein which silicide is not formed in a region of the high concentrationimpurity region 210 which overlaps with the sidewall insulating layer220 is shown; however, silicide may be formed in the entirehigh-concentration impurity region 210 (note that silicide is preventedfrom being formed in the channel formation region 206). Althoughsilicide may be formed on only the upper surface side of thehigh-concentration impurity region 210 to lower resistance of the sourceor drain region, silicide is preferably formed in a region which is incontact with the conductive layer 222 in order to lower contactresistance as well. After formation of silicide, the metal layer whichhas not reacted is removed by wet etching or dry etching.

Through the above, the channel formation region 206, the pair oflow-concentration impurity regions 208, and the pair ofhigh-concentration impurity regions 210 are formed in the semiconductorlayer 204. The channel formation region 206 is provided between the pairof high-concentration impurity regions 210, and each of the pair oflow-concentration impurity regions 208 is formed to be in contact withand between each of the pair of high-concentration impurity regions 210and the channel formation region 206. The channel formation region 206is provided in a region where the semiconductor layer 204 overlaps withthe conductive layer 216. The low-concentration impurity region 208 isformed in a region where the semiconductor layer 204 overlaps with theconductive layer 214 and does not overlap with the conductive layer 216.The high-concentration impurity region 210 is formed in a region wherethe semiconductor layer 204 does not overlap with the gate electrode218. The high-concentration impurity region 210 has the silicide region213 and the non-silicide region 209. The silicide region 213 ispositioned in a region which does not overlap with the gate electrode218 and the sidewall insulating layer 220, and the non-silicide region209 is positioned in a region which overlaps with the sidewallinsulating layer 220 and does not overlap with the gate electrode 218.

Next, the insulating layer 224 is formed so as to cover the insulatinglayer, conductive layer, and the like provided over the substrate 200.Then, after the openings which reach the conductive layers 222 areformed in the insulating layer 224, the conductive layers 226 are formedin the openings and over the insulating layer 224 (FIG. 8D).

The conductive layers 226 serve as source and drain electrodes. Theconductive layers 226 reach the conductive layers 222 through theopenings formed in the insulating layer 224. The conductive layers 222are in contact with the high-concentration impurity regions 210.Therefore, the conductive layer 226 serving as a source or drainelectrode is electrically connected to the high-concentration impurityregion 210 serving as a source or drain region with the conductive layer222 serving as a connecting wiring interposed therebetween.

The insulating layer 224 is formed by a CVD method, a sputtering method,an ALD method, or a coating method, or by combination of insulatinglayers formed by these methods to have a single layer structure or astacked-layer structure. For example, the insulating layer 224 is formedusing an inorganic insulating material such as silicon oxide, siliconnitride, silicon oxynitride, or silicon nitride oxide; or an insulatingmaterial containing carbon such as DLC (diamond-like carbon) by a CVDmethod, a sputtering method, or an ALD method. Further, the insulatinglayer 224 can be formed using an organic insulating material such asepoxy, polyimide, polyamide, polyvinyl phenol, benzocyclobutene, oracrylic; or a siloxane material such as a siloxane resin by a coatingmethod. Note that the siloxane material corresponds to a material havingSi—O—Si bonds. Siloxane includes a skeleton structure of a bond ofsilicon (Si) and oxygen (O). As a substituent, an organic groupcontaining at least hydrogen (such as an alkyl group or aromatichydrocarbon) is used. Alternatively, a fluoro group, or a fluoro groupand an organic group containing at least hydrogen can be used as asubstituent. Further, the insulating layer 224 may also be formed byforming an insulating layer by a CVD method, a sputtering method, an ALDmethod, or the like and then performing high-density plasma treatmentthereto in an oxygen atmosphere or a nitrogen atmosphere. Although theinsulating layer 224 of a single layer structure is formed over the gateelectrode 218 and the like here, a stacked-layer structure including twoor more layers may be employed. When the insulating layer has astacked-layer structure, the insulating layer in a lower layer (on theside in contact with the gate electrode and the like) is preferablyformed using an inorganic insulating material.

The conductive layers 226 which form source and drain electrodes areformed by a CVD method or a sputtering method using a conductivematerial such as a metal element, e.g., aluminum (Al), tungsten (W),titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel (Ni), platinum(Pt), copper (Cu), gold (Au), silver (Ag), manganese (Mg), or neodymium(Nd), or an alloy material or a compound material containing any of theabove metal elements, to have a single layer structure or astacked-layer structure. As examples of an alloy material containingaluminum, an alloy material containing aluminum as its main componentand nickel and an alloy material containing aluminum as its maincomponent, nickel, and at least one of carbon and silicon can be given.The conductive layer 226 can employ, for example, a stacked-layerstructure of a barrier layer, an aluminum-silicon (Al—Si) layer, and abarrier layer, or a stacked-layer structure of a barrier layer, analuminum-silicon (Al—Si) layer, a titanium nitride layer, and a barrierlayer. Note that a barrier layer corresponds to a thin film formed oftitanium, nitride of titanium, molybdenum, or nitride of molybdenum.Aluminum and aluminum silicon which have low resistance and areinexpensive are suitable for forming the conductive layers 226. Further,generation of a hillock of aluminum or aluminum silicon can be preventedwhen upper and lower barrier layers are provided. The conductive layer226 is formed to have a thickness of 50 to 1000 nm, preferably, 100 to800 nm, more preferably, 200 to 500 nm. Note that when a natural oxidefilm is formed at the bottom of the opening formed in the insulatinglayer 224, the natural oxide film is removed, and then the conductivelayer 226 is formed.

The opening formed in the insulating layer 224 is formed so that atleast part thereof overlaps with the conductive layer 222. For example,the insulating layer 224 is selectively covered with a resist mask, andregions not covered with the resist mask are etched to form theopenings. Although the openings can be formed by a wet etching method,it is preferable to use a dry etching method because fine processing iseasily performed. Further, after the openings are formed by dry etching,wet etching may be performed to remove a reaction product or the like.After formation of the openings, the resist mask is removed.Alternatively, ablation is utilized, so that the openings may bedirectly formed by irradiating the insulating layer 224 with a laserbeam selectively.

Note that the opening is formed in the insulating layer 224 so that theconductive layer 222 is exposed at the bottom of the opening. Part ofthe conductive layer 222 is etched in some cases, but the conductivelayer 222 is made to remain at least at the bottom of the opening. Theconductive layer 226 is formed in the opening formed in the insulatinglayer 224. The conductive layer 222 is in contact with the conductivelayer 226 through the opening. In addition, the conductive layer 222 isin contact with the high-concentration impurity region 210. Therefore,the conductive layer 226 is electrically connected to thehigh-concentration impurity region 210 with the conductive layer 222interposed therebetween. Also when the semiconductor layer has such athickness that part thereof is removed by etching in forming the openingin the insulating layer 224, with such a structure, contact between theconductive layer and the semiconductor layer can be favorable with theconductive layer 222. Accordingly, reliability of the semiconductordevice completed can be improved. In addition, it is preferable to formthe opening so as to reach a region where the conductive layer 222 doesnot overlap with the semiconductor layer 204. With such a structure, thesemiconductor layer can be prevented from being removed.

In this embodiment mode, the high-concentration impurity region 210 hasa region in which silicide is formed, and the conductive layer 222 is incontact with the region in which silicide is formed (the silicide region213). Therefore, contact resistance between the conductive layer and thesemiconductor layer can be reduced. As a result, deterioration ofoperating characteristics of the semiconductor device due to reductionin on current can be prevented.

By applying the present invention, electrical connection between theconductive layer and the semiconductor layer can be favorable, so thatreliability of the semiconductor device can be improved. In addition,since the semiconductor layer is formed over the conductive layerserving as a connection wiring, damage to the semiconductor layer due toetching or the like can be prevented.

This embodiment mode can be combined with other embodiment modes in thisspecification as appropriate.

(Embodiment Mode 3)

This embodiment mode will describe an example of a semiconductor devicehaving a different structure from that in the preceding embodiment modeswith reference to the drawings. Specifically, in this example, in thestructure of Embodiment Mode 2, an insulating layer is provided betweenthe conductive layer serving as a connection wiring and thesemiconductor layer, and the conductive layer serving as a connectionwiring and the semiconductor layer are in contact with and connected toeach other through an opening formed in the insulating layer. Note thatexplanation of the same structure as that in Embodiment Modes 1 and 2 issimplified or partially omitted.

FIG. 9A is a top view and FIGS. 9B and 9C are cross-sectional views forexplaining a main structure of a semiconductor device according to thisembodiment mode. FIGS. 9A to 9C particularly show a structure of a thinfilm transistor. FIG. 9A is a top view, FIG. 9B is a cross-sectionalview taken along a dashed line x-y in FIG. 9A, and FIG. 9C is across-sectional view taken along a dashed line o-p in FIG. 9A. In FIG.9A, illustration of part of a thin film and the like is omitted. Notethat these drawings show only an example and the structure can bechanged as appropriate depending on a desired layout.

A semiconductor device shown in FIGS. 9A to 9C includes a thin filmtransistor provided over a substrate 300 with an insulating layer 302interposed therebetween. The thin film transistor includes conductivelayers 322 provided over the insulating layer 302, an insulating layer328 provided over the insulating layer 302 and the conductive layers322, an island-shaped semiconductor layer 304 which is partially incontact with the conductive layers 322 through openings provided in theinsulating layer 328, an insulating layer 312 provided over thesemiconductor layer 304, conductive layers 314 and 316 provided over thesemiconductor layer 304 with the insulating layer 312 interposedtherebetween, and insulating layers 320 provided to be in contact withthe side surfaces of the conductive layers 314 and 316. The pair ofconductive layers 322 are provided to be in contact with thesemiconductor layer 304, and the pair of conductive layers 322 are incontact with a pair of impurity regions 310 included in thesemiconductor layer 304. The insulating layer 328 is provided betweenthe pair of conductive layers 322, and the semiconductor layer 304 isprovided over the insulating layer 328. The semiconductor layer 304 andthe conductive layers 322 are insulated with the insulating layer 328except regions where the semiconductor layer 304 and the conductivelayers 322 are in contact with each other through the openings. Inaddition, an insulating layer 324 is provided to cover the semiconductorlayer 304, the conductive layer 316, and the like, and openings whichreach the conductive layers 322 are formed in the insulating layers 324and 328. Conductive layers 326 are formed in the openings formed in theinsulating layers 324 and 328, and the conductive layers 326 are incontact with the conductive layers 322 through the openings. Theconductive layer 326 and the semiconductor layer 304 are electricallyconnected to each other with the conductive layer 322 interposedtherebetween.

Next, an example of a method for manufacturing the semiconductor deviceshown in FIGS. 9A to 9C will be described with reference to thedrawings.

The conductive layers 322 are formed by the steps of forming aconductive layer over the entire surface of the substrate 300 with theinsulating layer 302 interposed therebetween and etching the conductivelayer selectively into a desired shape. Next, an insulating layer 327 isformed so as to cover the insulating layer 302 and the conductive layers322 (FIG. 10A). The substrate 300, the insulating layer 302, and theconductive layers 322 are formed based on the description of thesubstrate 200, the insulating layer 202, and the conductive layers 222in Embodiment Mode 2 and thus the description thereof is omitted.

The insulating layer 327 is formed by a CVD method, a sputtering method,an ALD method, or the like using an inorganic insulating material suchas silicon oxide, silicon nitride, silicon oxynitride, or siliconnitride oxide, or an insulating material containing carbon such as DLC(diamond-like carbon). The insulating layer 327 is formed to have athickness of 1 to 200 nm. When the end portions of the conductive layers322 are gently tapered, coverage defects of the conductive layer 327provided thereover can be prevented. In this embodiment mode, theinsulating layer 327 is formed of a silicon oxynitride layer with athickness of 100 nm.

Next, the insulating layer 327 is selectively etched to expose theconductive layers 322 partially, so that the insulating layer 328 isformed (FIG. 10B).

For example, the insulating layer 327 is selectively covered with aresist mask, and regions not covered with the resist mask are etched, sothat the insulating layer 328 which partially exposes the conductivelayers 322 can be formed. The etching may be performed by either a dryetching method or a wet etching method. Alternatively, ablation isutilized, so that the openings may be directly formed by irradiating theinsulating layer 327 with a laser beam selectively.

Next, the island-shaped semiconductor layer 304 is formed over theinsulating layer 328. The semiconductor layer 304 is formed to be incontact with the conductive layers 322 exposed (FIG. 10C).

For the semiconductor layer 304, a single crystalline semiconductor or acrystalline semiconductor is preferably used. The semiconductor layer304 is formed to have a thickness of 5 to 150 nm, preferably, 10 to 25nm. The detailed description of crystallization and the like of thesemiconductor layer is based on the description of the semiconductorlayer 104 shown in Embodiment Mode 1. It is preferable to use lasercrystallization using a CW laser or a pulsed laser with a repetitionrate of greater than or equal to 10 MHz since crystal grains which areelongated in one direction can be formed.

The island-shaped semiconductor layer 304 can be formed as follows: asemiconductor layer formed over the insulating layer 328 by a CVD methodor a sputtering method is crystallized and then selectively etched. Theisland-shaped semiconductor layer 304 is formed so as to be in contactwith the exposed portions of the conductive layers 322. When thethickness of the semiconductor layer 304 is set to be less than or equalto 50 nm, the semiconductor layer may be thinned by etching after beingformed to have a thickness of greater than or equal to 50 nm.

In this embodiment mode, a crystalline silicon layer with a thickness of20 nm is formed for the semiconductor layer 304. In this embodimentmode, the insulating layer 328 is formed so as to cover the conductivelayers 322, and the semiconductor layer 304 and the conductive layers322 are insulated with the insulating layer 328 except in the openings.With such a structure, defects that a conductive material forming theconductive layers 322 leaks into the semiconductor layer 304 and thelike can be suppressed. In addition, the conductive layers 322 arecovered with the insulating layer 328 except in parts to be exposed, sothat damage thereto in forming the semiconductor layer 304 can beprevented.

Next, after the insulating layer 312 is formed over the semiconductorlayer 304, a stacked-layer structure of the conductive layers 314 and316 which constitute the gate electrode 318 is formed over theinsulating layer 312. Then, after an impurity element which imparts oneconductivity type is added at a first concentration with the gateelectrode 318 as a mask, the sidewall insulating layers 320 which are incontact with the side surfaces of the gate electrode 318 and theinsulating layer 312 are formed. Then, an impurity element which impartsone conductivity type is added at a second concentration with thesidewall insulating layers 320 and the gate electrode 318 as a mask, sothat a pair of high-concentration impurity regions 310, a pair oflow-concentration impurity regions 308, and a channel formation region306 are formed in a self-aligned manner. Impurity elements having thesame conductivity type are added at the first concentration and thesecond concentration. For example, an impurity element which impartsp-type conductivity such as boron (B), aluminum (Al), or gallium (Ga),or an impurity element which imparts n-type conductivity such asphosphorus (P) or arsenic (As) can be added. Note that the secondconcentration is made higher than the first concentration. In addition,regions of the semiconductor layer 304 which do not overlap with thesidewall insulating layers 320 (the high-concentration impurity regions310) are exposed by etching for forming the sidewall insulating layers320.

After a metal layer is formed to be in contact with at least the exposedregions of the high concentration impurity regions 310, heat treatmentis performed to the high-concentration impurity regions 310, so thatsilicide is formed in regions of the high-concentration impurity regions310 which are in contact with the metal layer. Here, an example is shownin which silicide is formed in the entire high-concentration impurityregions 310 (FIG. 10D). The steps before formation of the channelformation region 306, the low-concentration impurity regions 308, andthe high-concentration impurity regions 310 in which silicide is formedin the island-shaped semiconductor layer 304 after formation of thesemiconductor layer 304 are based on the description of the insulatinglayer 112, the conductive layers 114 and 116, the sidewall insulatinglayers 120, the semiconductor layer 104, and the like in Embodiment Mode1, and thus omitted.

Note that an impurity element which imparts one conductivity type may beadded to the channel formation region 306 in order to control thethreshold voltage of the transistor, and the impurity element may beadded to the channel formation region 306 before the gate electrode 318is formed.

Further, after the impurity element which imparts one conductivity typeis added to the semiconductor layer 304, heat treatment may be performedto activate the impurity element added. The heat treatment can beperformed by laser beam irradiation, RTA, or using an annealing furnace.Specifically, the heat treatment may be performed at temperatures of 400to 700° C., preferably 500 to 650° C. Further, the heat treatment ispreferably performed in a nitrogen atmosphere.

An example is shown in which silicide is formed in the entirehigh-concentration impurity regions 310. However, the present inventionis not limited thereto, and silicide is not required to be formed in thehigh-concentration impurity regions 310 or silicide may be formed inpart of the high-concentration impurity regions 310. In addition,silicide may be formed also below the sidewall insulating layers 320(except the channel formation region 306).

Next, the insulating layer 324 is formed so as to cover the insulatinglayer, conductive layer, and the like provided over the substrate 300.Then, after openings which reach the conductive layers 322 are formed inthe insulating layers 324 and 328, the conductive layers 326 are formedin the openings and over the insulating layer 324 (FIG. 10D).

The conductive layers 326 serve as source and drain electrodes. Theconductive layers 326 reach the conductive layers 322 through theopenings formed in the insulating layers 324 and 328. The conductivelayers 322 are in contact with the high-concentration impurity regions310. Therefore, the conductive layers 326 serving as source and drainelectrodes are electrically connected to the high-concentration impurityregions 310 serving as source and drain regions with the conductivelayers 322 serving as connecting wirings interposed therebetween.

The insulating layer 324 and the conductive layers 326 are based on theinsulating layer 224 and the conductive layers 226 described inEmbodiment Mode 2, and thus the description thereof is omitted.

The opening formed in the insulating layers 324 and 328 is formed sothat at least part thereof overlaps with the conductive layer 322. Forexample, the insulating layer 324 is selectively covered with a resistmask, and regions not covered with the resist mask are etched to formthe openings. Although the openings can be formed by a wet etchingmethod, it is preferable to use a dry etching method because fineprocessing is easily performed. Further, after the openings are formedby dry etching, wet etching may be performed to remove a reactionproduct or the like. After formation of the openings, the resist mask isremoved. Alternatively, ablation is utilized, so that the openings maybe directly formed by irradiating the insulating layers 324 and 328 witha laser beam selectively.

Note that the openings are formed in the insulating layers 324 and 328so that the conductive layers 322 are exposed at the bottom of theopenings. Parts of the conductive layers 322 are etched in some cases,but the conductive layers 322 are made to remain at least at the bottomof the openings. The conductive layers 326 are formed in the openingsformed in the insulating layers 324 and 328. The conductive layers 322are in contact with the conductive layer 326 through the openings. Inaddition, the conductive layers 322 are in contact with thehigh-concentration impurity regions 310. Therefore, the conductivelayers 326 are electrically connected to the high-concentration impurityregions 310 with the conductive layers 322 interposed therebetween. Itis preferable to form the opening so as to reach a region where theconductive layer 322 does not overlap with the semiconductor layer 304.With such a structure, the semiconductor layer can be prevented frombeing removed, and contact between the conductive layer and thesemiconductor layer can be favorable. Accordingly, reliability of thesemiconductor device completed can be improved.

It is also possible that the conductive layer 326 is electricallyconnected to the semiconductor layer 304 through an opening formed inthe insulating layer 324 in a region where the insulating layer 328 isnot formed. In this case, also when the semiconductor layer has such athickness that part thereof is removed by etching in forming the openingin the insulating layer 324, contact between the conductive layer andthe semiconductor layer can be favorable with the conductive layer 322.

In this embodiment mode, the insulating layer 328 is provided betweenthe conductive layers 322 serving as connecting wirings and thesemiconductor layer 304. Specifically, the insulating layer 328 havingthe openings is provided so as to cover the conductive layers 322, andthe conductive layers 322 are partially exposed in the openings. Thesemiconductor layer 304 is provided over the conductive layers 322 andthe insulating layer 328 which covers the conductive layers 322. Inaddition, the semiconductor layer 304 is in contact with the conductivelayers 322 through the openings formed in the insulating layer 328. Thesemiconductor layer 304 and the conductive layers 322 are insulated withthe insulating layer 328 except the regions where the semiconductorlayer 304 and the conductive layers 322 are in contact with each otherthrough the openings. By the insulating layer 328, the conductive layer322 can also be provided to get across a part below the semiconductorlayer 304 without contact with the semiconductor layer 304; therefore,higher integration can be achieved with a multilayer wiring structure.

In addition, silicide is formed in the high-concentration impurityregions 310, and the conductive layers 322 are in contact with thehigh-concentration impurity regions 310 in which silicide is formed.Therefore, contact resistance between the conductive layers and thesemiconductor layer can be reduced. As a result, deterioration ofoperating characteristics of the semiconductor device due to reductionin on current can be prevented.

By applying the present invention, electrical connection between theconductive layer and the semiconductor layer can be favorable, so thatreliability of the semiconductor device can be improved. In addition,since a multilayer wiring structure can be made, much higher integrationis possible.

This embodiment mode can be combined with other embodiment modes in thisspecification as appropriate.

(Embodiment Mode 4)

This embodiment mode will describe an example of a semiconductor devicehaving a different structure from that in the preceding embodiment modesand a manufacturing method thereof with reference to FIGS. 14 to 18C.Specifically, an example of a semiconductor device including a pluralityof thin film transistors having different conductivity types will bedescribed.

FIG. 14 is a top view and FIGS. 15A and 15B are cross-sectional views ofa semiconductor device shown in this embodiment mode, and an example ofa semiconductor device including a plurality of thin film transistors(hereinafter also referred to as TFTs) is shown. FIG. 14 is a top view,FIG. 15A is a cross-sectional view taken along a dashed line A1-B1 inFIG. 14, and FIG. 15B is a cross-sectional view taken along a dashedline A2-B2 in FIG. 14. In FIG. 14, illustration of part of componentssuch as a thin film is omitted. Note that these drawings show only anexample and the structure can be changed as appropriate depending on adesired layout.

A semiconductor device shown in FIGS. 15A and 15B includes TFTs 710,720, 740, and 750 provided over a substrate 800 with an insulating layer802 interposed therebetween. The TFTs 710 and 720 are electricallyconnected to each other through a conductive layer 854 to constitute aCMOS transistor 730. In addition, the TFTs 740 and 750 are electricallyconnected to each other through a conductive layer 844 to constitute aCMOS transistor 760.

The CMOS transistor 730 includes a conductive layer 852, the conductivelayer 854, and a conductive layer 856 provided over the substrate 800with the insulating layer 802 interposed therebetween, an insulatinglayer 835 provided to cover the conductive layers 852, 854, and 856, theTFT 710 connected to the conductive layers 852 and 854 through openingsformed in the insulating layer 835, and the TFT 720 connected to theconductive layers 854 and 856 through openings formed in the insulatinglayer 835. In addition, insulating layers 836 and 838 are provided tocover the TFTs 710 and 720. In the insulating layers 836 and 838,openings which reach the conductive layers 852, 854, and 856 are formed.A conductive layer 840 is formed in the opening which reaches theconductive layer 852, and the conductive layer 840 is in contact withthe conductive layer 852 through the opening. A conductive layer 841 isformed in the opening which reaches the conductive layer 854, and theconductive layer 841 is in contact with the conductive layer 854 throughthe opening. A conductive layer 842 is formed in another opening whichreaches the conductive layer 854, and the conductive layer 842 is incontact with the conductive layer 854 through the opening. A conductivelayer 843 is formed in the opening which reaches the conductive layer856, and the conductive layer 843 is in contact with the conductivelayer 856 through the opening. The conductive layers 840, 841, 842, and843 serve as source and drain electrodes.

The TFT 710 includes an island-shaped semiconductor layer 805 providedover the insulating layer 835, conductive layers 823 and 825 included ina gate electrode which are provided over the semiconductor layer 805with an insulating layer 822 interposed therebetween, and sidewallinsulating layers 827 provided to be in contact with the side surfacesof the conductive layers 823 and 825.

The island-shaped semiconductor layer 805 includes a channel formationregion 806, a pair of low-concentration impurity regions 808 serving asLDD regions, and a pair of high-concentration impurity regions 810serving as source and drain regions. The channel formation region 806 isformed in a region of the semiconductor layer 805 which overlaps withthe conductive layers 823 and 825 with the insulating layer 822interposed therebetween. The low-concentration impurity region 808 isformed in a region of the semiconductor layer 805 which overlaps withthe sidewall insulating layer 827 with the insulating layer 822interposed therebetween. The high-concentration impurity region 810 isformed in a region of the semiconductor layer 805 which does not overlapwith the conductive layers 823 and 825 and the sidewall insulating layer827 with the insulating layer 822 interposed therebetween. In otherwords, in the semiconductor layer 805, the channel formation region 806is formed in a region which overlaps with the conductive layers 823 and825 and the impurity regions (the low-concentration impurity region 808and the high-concentration impurity region 810) are formed outside theregion which overlaps with the conductive layers 823 and 825. Here,silicide is formed in the entire high-concentration impurity region 810.

The channel formation region 806 is positioned between the pair ofhigh-concentration impurity regions 810, and each of thelow-concentration impurity regions 808 is positioned between the channelformation region 806 and each of the high-concentration impurity regions810. That is, the channel formation region 806 is positioned between thepair of high-concentration impurity regions 810 and between the pair oflow-concentration impurity regions 808, and is in contact with the pairof low-concentration impurity regions 808. The concentration of animpurity element which imparts one conductivity type added to thehigh-concentration impurity regions 810 is higher than that of thelow-concentration impurity regions 808.

In addition, the insulating layer 822 serving as a gate insulating layeris formed only in a region where the semiconductor layer 805, thesidewall insulating layers 827, and the conductive layers 823 and 825included in the gate electrode overlap with one another. When silicideis not formed in the semiconductor layer, the insulating layer 822serving as a gate insulating layer may be formed to cover the entiresemiconductor layer. Further, parts of the high-concentration impurityregions 810 formed in the semiconductor layer 805 are in contact withthe conductive layers 852 and 854 through the openings formed in theinsulating layer 835. Therefore, the high-concentration impurity regions810 formed in the semiconductor layer 805 are electrically connected tothe conductive layers 840 and 841 with the conductive layers 852 and854, respectively, interposed therebetween. The conductive layers 852and 854 serve as connecting wirings.

The TFT 720 includes an island-shaped semiconductor layer 813 providedover the insulating layer 835, conductive layers 824 and 826 included ina gate electrode which are provided over the semiconductor layer 813with the insulating layer 822 interposed therebetween, and sidewallinsulating layers 828 provided to be in contact with the side surfacesof the conductive layers 824 and 826.

The island-shaped semiconductor layer 813 includes a channel formationregion 814, a pair of low-concentration impurity regions 816 serving asLDD regions, and a pair of high-concentration impurity regions 818serving as source and drain regions. The channel formation region 814 isformed in a region of the semiconductor layer 813 which overlaps withthe conductive layers 824 and 826 with the insulating layer 822interposed therebetween. The low-concentration impurity region 816 isformed in a region of the semiconductor layer 813 which overlaps withthe sidewall insulating layer 828 with the insulating layer 822interposed therebetween. The high-concentration impurity region 818 isformed in a region of the semiconductor layer 813 which does not overlapwith the conductive layers 824 and 826 and the sidewall insulatinglayers 828 with the insulating layer 822 interposed therebetween. Inother words, in the semiconductor layer 813, the channel formationregion 814 is formed in a region which overlaps with the conductivelayers 824 and 826 and the impurity regions (the low-concentrationimpurity region 816 and the high-concentration impurity region 818) areformed outside the region which overlaps with the conductive layers 824and 826. Here, silicide is formed in the entire high-concentrationimpurity region 818.

The channel formation region 814 is positioned between the pair ofhigh-concentration impurity regions 818, and each of thelow-concentration impurity regions 816 is positioned between the channelformation region 814 and each of the high-concentration impurity regions818. That is, the channel formation region 814 is positioned between thepair of high-concentration impurity regions 818 and between the pair oflow-concentration impurity regions 816, and is in contact with the pairof low-concentration impurity regions 816. The concentration of animpurity element which imparts one conductivity type added to thehigh-concentration impurity regions 818 is higher than that of thelow-concentration impurity regions 816.

In addition, the insulating layer 822 serving as a gate insulating layeris formed only in a region where the semiconductor layer 813, thesidewall insulating layers 828, and the conductive layers 824 and 826included in the gate electrode overlap with one another. When silicideis not formed in the semiconductor layer, the insulating layer 822serving as a gate insulating layer may be formed to cover the entiresemiconductor layer. Further, parts of the high-concentration impurityregions 818 formed in the semiconductor layer 813 are in contact withthe conductive layers 854 and 856 through the openings formed in theinsulating layer 835. Therefore, the high-concentration impurity regions818 formed in the semiconductor layer 813 are electrically connected tothe conductive layers 842 and 843 with the conductive layers 854 and856, respectively, interposed therebetween. The conductive layers 854and 856 serve as connecting wirings.

The semiconductor layer 805 included in the TFT 710 and thesemiconductor layer 813 included in the TFT 720 are doped with impurityelements having different conductivity types. In other words, theimpurity element added to the low-concentration impurity regions 808 andthe high-concentration impurity regions 810 has a different conductivitytype from that of the impurity element added to the low-concentrationimpurity regions 816 and the high-concentration impurity regions 818.

The high-concentration impurity region 818 formed in the semiconductorlayer 813 included in the TFT 720 and the high-concentration impurityregion 810 formed in the semiconductor layer 805 included in the TFT 710are electrically connected to each other through the conductive layer854 serving as a connecting wiring, whereby the CMOS transistor 730 isformed.

The CMOS transistor 760 includes a conductive layer 858, a conductivelayer 860, a conductive layer 862, and a conductive layer 864 providedover the substrate 800 with the insulating layer 802 interposedtherebetween, the insulating layer 835 provided to cover the conductivelayers 858, 860, 862, and 864, the TFT 740 connected to the conductivelayers 858 and 860 through openings formed in the insulating layer 835,and the TFT 750 connected to the conductive layers 862 and 864 throughopenings formed in the insulating layer 835. In addition, the insulatinglayers 836 and 838 are provided to cover the TFTs 740 and 750. In theinsulating layers 836 and 838, openings which reach the conductivelayers 858, 860, 862, and 864 are formed. A conductive layer 846 isformed in the opening which reaches the conductive layer 858, and theconductive layer 846 is in contact with the conductive layer 858 throughthe opening. A conductive layer 844 is formed in the opening whichreaches the conductive layer 860 and the opening which reaches theconductive layer 862, and the conductive layer 844 is in contact withthe conductive layers 860 and 862 through the openings. A conductivelayer 845 is formed in the opening which reaches the conductive layer864, and the conductive layer 845 is in contact with the conductivelayer 864 through the opening. The conductive layers 844, 845, and 846serve as source or drain electrodes.

The TFT 740 includes an island-shaped semiconductor layer 905 providedover the insulating layer 835, the conductive layers 823 and 825included in a gate electrode which are provided over the semiconductorlayer 905 with the insulating layer 822 interposed therebetween, and thesidewall insulating layers 827 provided to be in contact with the sidesurfaces of the conductive layers 823 and 825.

The island-shaped semiconductor layer 905 includes a channel formationregion 906, a pair of low-concentration impurity regions 908 serving asLDD regions, and a pair of high-concentration impurity regions 910serving as source and drain regions. The channel formation region 906 isformed in a region of the semiconductor layer 905 which overlaps withthe conductive layers 823 and 825 with the insulating layer 822interposed therebetween. The low-concentration impurity region 908 isformed in a region of the semiconductor layer 905 which overlaps withthe sidewall insulating layer 827 with the insulating layer 822interposed therebetween. The high-concentration impurity region 910 isformed in a region of the semiconductor layer 905 which does not overlapwith the conductive layers 823 and 825 and the sidewall insulating layer827 with the insulating layer 822 interposed therebetween. In otherwords, in the semiconductor layer 905, the channel formation region 906is formed in a region which overlaps with the conductive layers 823 and825 and the impurity regions (the low-concentration impurity region 908and the high-concentration impurity region 910) are formed outside theregion which overlaps with the conductive layers 823 and 825. Here,silicide is formed in the entire high-concentration impurity region 910.

The channel formation region 906 is positioned between the pair ofhigh-concentration impurity regions 910, and each of thelow-concentration impurity regions 908 is positioned between the channelformation region 906 and each of the high-concentration impurity regions910. That is, the channel formation region 906 is positioned between thepair of high-concentration impurity regions 910 and between the pair oflow-concentration impurity regions 908, and is in contact with the pairof low-concentration impurity regions 908. The concentration of animpurity element which imparts one conductivity type added to thehigh-concentration impurity regions 910 is higher than that of thelow-concentration impurity regions 908.

In addition, the insulating layer 822 serving as a gate insulating layeris formed only in a region where the semiconductor layer 905, thesidewall insulating layers 827, and the conductive layers 823 and 825included in the gate electrode overlap with one another. When silicideis not formed in the semiconductor layer, the insulating layer 822serving as a gate insulating layer may be formed to cover the entiresemiconductor layer. Further, parts of the high-concentration impurityregions 910 formed in the semiconductor layer 905 are in contact withthe conductive layers 858 and 860 through the openings formed in theinsulating layer 835. Therefore, the high-concentration impurity regions910 formed in the semiconductor layer 905 are electrically connected tothe conductive layers 846 and 844 with the conductive layers 858 and860, respectively, interposed therebetween. The conductive layers 858and 860 serve as connecting wirings.

The TFT 750 includes an island-shaped semiconductor layer 913 providedover the insulating layer 835, the conductive layers 824 and 826included in a gate electrode which are provided over the semiconductorlayer 913 with the insulating layer 822 interposed therebetween, and thesidewall insulating layers 828 provided to be in contact with the sidesurfaces of the conductive layers 824 and 826.

The island-shaped semiconductor layer 913 includes a channel formationregion 914, a pair of low-concentration impurity regions 916 serving asLDD regions, and a pair of high-concentration impurity regions 918serving as source and drain regions. The channel formation region 914 isformed in a region of the semiconductor layer 913 which overlaps withthe conductive layers 824 and 826 with the insulating layer 822interposed therebetween. The low-concentration impurity region 916 isformed in a region of the semiconductor layer 913 which overlaps withthe sidewall insulating layer 828 with the insulating layer 822interposed therebetween. The high-concentration impurity region 918 isformed in a region of the semiconductor layer 913 which does not overlapwith the conductive layers 824 and 826 and the sidewall insulating layer828 with the insulating layer 822 interposed therebetween. In otherwords, in the semiconductor layer 913, the channel formation region 914is formed in a region which overlaps with the conductive layers 824 and826 and the impurity regions (the low-concentration impurity region 916and the high-concentration impurity region 918) are formed outside theregion which overlaps with the conductive layers 824 and 826. Here,silicide is formed in the entire high-concentration impurity region 918.

The channel formation region 914 is positioned between the pair ofhigh-concentration impurity regions 918, and each of thelow-concentration impurity regions 916 is positioned between the channelformation region 914 and each of the high-concentration impurity regions918. That is, the channel formation region 914 is positioned between thepair of high-concentration impurity regions 918 and between the pair oflow-concentration impurity regions 916, and is in contact with the pairof low-concentration impurity regions 916. The concentration of animpurity element which imparts one conductivity type added to thehigh-concentration impurity regions 918 is higher than that of thelow-concentration impurity regions 916.

In addition, the insulating layer 822 serving as a gate insulating layeris formed only in a region where the semiconductor layer 913, thesidewall insulating layers 828, and the conductive layers 824 and 826included in the gate electrode overlap with one another. When silicideis not formed in the semiconductor layer, the insulating layer 822serving as a gate insulating layer may be formed to cover the entiresemiconductor layer. Further, parts of the high-concentration impurityregions 918 formed in the semiconductor layer 913 are in contact withthe conductive layers 862 and 864 through the openings formed in theinsulating layer 835. Therefore, the high-concentration impurity regions918 formed in the semiconductor layer 913 are electrically connected tothe conductive layers 844 and 845 with the conductive layers 862 and864, respectively, interposed therebetween. The conductive layers 862and 864 serve as connecting wirings.

The semiconductor layer 905 included in the TFT 740 and thesemiconductor layer 913 included in the TFT 750 are doped with impurityelements having different conductivity types. In other words, theimpurity element added to the low-concentration impurity regions 908 andthe high-concentration impurity regions 910 has a different conductivitytype from that of the impurity element added to the low-concentrationimpurity regions 916 and the high-concentration impurity regions 918.

The high-concentration impurity region 918 formed in the semiconductorlayer 913 included in the TFT 750 and the high-concentration impurityregion 910 formed in the semiconductor layer 905 included in the TFT 740are electrically connected to each other through the conductive layer844 serving as a source or drain electrode, whereby the CMOS transistor760 is formed.

The gate electrode formed of a stacked-layer structure of the conductivelayers 823 and 825 is provided so as to get across the island-shapedsemiconductor layers 805 and 905. In addition, the sidewall-insulatinglayers 827 are formed to be in contact with the side surfaces of theconductive layers 823 and 825. Similarly, the gate electrode formed of astacked-layer structure of the conductive layers 824 and 826 is providedso as to get across the island-shaped semiconductor layers 813 and 913.In addition, the sidewall-insulating layers 828 are formed to be incontact with the side surfaces of the conductive layers 824 and 826.Although the example in which the gate electrode has a stacked-layerstructure including two conductive layers is shown, the presentinvention is not limited thereto. For example, a single layer structureor a stacked-layer structure including three or more layers may be used.When the gate electrode is formed of a stacked-layer structure, thewidth of the lower conductive layer may be made larger than that of theupper conductive layer. Further, the side surface of the conductivelayer formed as the gate electrode may be tapered, or a stacked-layerstructure including two or more conductive layers in which the taperangles are different among the layers may be employed. When silicide isnot formed later, the sidewall insulating layers 827 and 828 are notrequired to be formed.

Next, an example of a method for manufacturing the semiconductor deviceshown in FIGS. 14 to 15B will be described with reference to thedrawings. Here, an example of a method for manufacturing the CMOStransistor 730 shown in FIG. 15A will be described.

The conductive layers 852, 854, and 856 are formed over the substrate800 with the insulating layer 802 interposed therebetween (FIG. 16A).

For the substrate 800, a substrate having an insulating surface may beused. For example, a glass substrate, a quartz substrate, a sapphiresubstrate, a ceramic substrate, a metal substrate with an insulatinglayer formed over the surface, or the like can be used.

The insulating layer 802 is formed using silicon oxide, silicon nitride,silicon oxynitride, silicon nitride oxide, or the like by a CVD method,a sputtering method, an ALD method, or the like. The insulating layer802 serves as a blocking layer that prevents contamination of thesemiconductor layer due to diffusion of an alkali metal or the like fromthe substrate 800 to the semiconductor layer. In addition, when thesurface of the substrate 800 is uneven, the insulating layer 802 canserve as a layer for planarization. Note that the insulating layer 802is not necessary to be formed if impurity diffusion from the substrate800 or unevenness of the surface of the substrate 800 is not a problem.Further, although the base insulating layer has a single layerstructure, it may have a stacked-layer structure including two or morelayers.

The conductive layers 852, 854, and 856 are formed by the steps offorming a conductive layer using a conductive material such as a metalelement, e.g., titanium (Ti), tantalum (Ta), tungsten (W), or molybdenum(Mo), or an alloy material or a compound material containing any of theabove metal elements by a CVD method or a sputtering method over theentire surface of the substrate and selectively etching the conductivelayer into a desired shape. Preferably, the conductive layers 852, 854,and 856 are processed so as to have tapered end portions.

Next, the insulating layer 835 is formed so as to cover the insulatinglayer 802 and the conductive layers 852, 854, and 856. After theinsulating layer 835 is selectively etched to expose parts of theconductive layers 852, 854, and 856, the island-shaped semiconductorlayers 805 and 813 are formed (FIG. 16B). At this time, parts of thesemiconductor layer 805 are in contact with the exposed conductivelayers 852 and 854. That is, the semiconductor layer 805 is formed so asto be in contact with the conductive layers 852 and 854 through theopenings formed in the insulating layer 835. In addition, parts of thesemiconductor layer 813 are in contact with the exposed conductivelayers 854 and 856. That is, the semiconductor layer 813 is formed so asto be in contact with the conductive layers 854 and 856 through theopenings formed in the insulating layer 835.

The insulating layer 835 is formed by a CVD method, a sputtering method,an ALD method, or the like using an inorganic insulating material suchas silicon oxide, silicon nitride, silicon oxynitride, or siliconnitride oxide, or an insulating material containing carbon such as DLC(diamond-like carbon).

The semiconductor layers 805 and 813 are preferably formed using amaterial mainly containing silicon, specifically, silicon, germanium,silicon germanium, or the like by a CVD method or a sputtering method.For example, the semiconductor layers 805 and 813 can be formed asfollows: an amorphous semiconductor layer is formed using a materialmainly containing silicon, the amorphous semiconductor layer iscrystallized and selectively etched, and thus the island-shapedsemiconductor layers are formed. When the amorphous semiconductor layeris crystallized, a laser crystallization method, a thermalcrystallization method using RTA or an annealing furnace, a thermalcrystallization method using a metal element that promotescrystallization, or a method combining these methods can be used. It ispreferable to use laser crystallization using a CW laser or a pulsedlaser with a repetition rate of greater than or equal to 10 MHz sincecrystal grains which are elongated in one direction can be formed.

The semiconductor layers 805 and 813 are formed to have a thickness of 5to 150 nm, preferably, 10 to 25 nm. When the thickness of thesemiconductor layers is set to be less than or equal to 50 nm, thesemiconductor layers may be thinned by etching after being formed tohave a thickness of greater than or equal to 50 nm.

The semiconductor layers 805 and 813 may be formed such that the endportions have a tapered shape or a perpendicular shape. The shape of theend portions of the semiconductor layers can be controlled byappropriately selecting etching conditions.

Next, the insulating layer 822 is formed over the semiconductor layers805 and 813 (FIG. 16C).

The insulating layer 822 is formed by a CVD method, a sputtering method,or an ALD method using silicon oxide, silicon nitride, siliconoxynitride, silicon nitride oxide, aluminum nitride, or the like. Theinsulating layer 822 is formed to have a single layer structure or astacked-layer structure of at least one of the above materials. Further,the insulating layer 822 can also be formed by solid phase oxidation orsolid phase nitridation of the semiconductor layers 805 and 813 withhigh-density plasma treatment. The insulating layer 822 serves as a gateinsulating layer.

In order to control the threshold voltage of the thin film transistorsto be completed later, an impurity element which imparts oneconductivity type may be added to the semiconductor layers 805 and 813at a low concentration. In this case, the impurity element is also addedto the channel formation regions of the thin film transistors to becompleted. As the impurity element which imparts one conductivity type,an impurity element which imparts n-type conductivity such as phosphorus(P) or arsenic (As) or an impurity element which imparts p-typeconductivity such as boron (B), aluminum (Al), or gallium (Ga) can beused. For example, boron can be added as the impurity element to thesemiconductor layers 805 and 813 to be contained at a concentration ofabout 1×10¹⁶ to 1×10¹⁸ cm⁻³. Note that the impurity element may be addedto the semiconductor layers 805 and 813 at different concentrations orthe impurity elements having different conductivity types may be addedto the semiconductor layers 805 and 813.

The conductive layers 823 and 825 and the conductive layers 824 and 826are stacked over the semiconductor layers 805 and 813, respectively,with the insulating layer 822 interposed therebetween, to serve as gateelectrodes (FIG. 16D).

Each of the conductive layers included in the gate electrode can beformed by forming a conductive layer by a CVD method or a sputteringmethod using a metal element such as tantalum (Ta), tungsten (W),titanium (Ti), molybdenum (Mo), chromium (Cr), aluminum (Al), copper(Cu), or niobium (Nb), or an alloy material or a compound materialcontaining the above-described metal element over the entire surface ofthe substrate, and then selectively etching the conductive layer.Further, a semiconductor material typified by polycrystalline silicon towhich an impurity element which imparts one conductivity type such asphosphorus is added can also be used. Note that the gate electrode maybe formed of a single layer structure or a stacked-layer structure ofthree or more conductive layers. Further, the side surface of theconductive layer may be tapered. When the gate electrode has astacked-layer structure of conductive layers, the width of the lowerconductive layer may be made larger than the upper conductive layer, ora tapered shape in which the side surface of each layer has a differentangle may be used.

In this embodiment mode, the stacked-layer structure of the conductivelayers 823 and 825 and the stacked-layer structure of the conductivelayers 824 and 826 are formed as follows: a stacked-layer structure ofconductive layers is formed over the entire surface of the substrate andthen selectively etched into a desired shape.

Next, a resist mask 870 is selectively formed so as to cover thesemiconductor layer 813, and an impurity element 851 which imparts oneconductivity type is added to the semiconductor layer 805 at a firstconcentration with the resist mask 870 and the conductive layers 823 and825 as masks, whereby impurity regions 807 are formed (FIG. 17A). Inthis embodiment mode, the impurity element 851 is added with theconductive layers 823 and 825 as a mask, so that the pair of impurityregions 807 and the channel formation region 806 which is positionedbetween the pair of impurity regions 807 are formed in a self-alignedmanner. The impurity regions 807 are formed in regions of thesemiconductor layer 805 which do not overlap with the conductive layers823 and 825. In addition, the channel formation region 806 is formed inthe semiconductor layer 805 below the conductive layers 823 and 825. Asthe impurity element 851, an impurity element which imparts n-typeconductivity such as phosphorus or arsenic or an impurity element whichimparts p-type conductivity such as boron, aluminum, or gallium can beused. In this embodiment mode, phosphorus (P) is added as the impurityelement 851. Note that parts of the impurity regions 807 formlow-concentration impurity regions which serve as LDD regions later.

Next, a resist mask 872 is selectively formed so as to cover thesemiconductor layer 805, and an impurity element 853 which imparts oneconductivity type is added to the semiconductor layer 813 at a secondconcentration with the resist mask 872 and the conductive layers 824 and826 as masks, whereby impurity regions 815 are formed (FIG. 17B). Inthis embodiment mode, the impurity element 853 is added with theconductive layers 824 and 826 as a mask, so that the pair of impurityregions 815 and the channel formation region 814 which is positionedbetween the pair of impurity regions 815 are formed in a self-alignedmanner. The impurity regions 815 are formed in regions of thesemiconductor layer 813 which do not overlap with the conductive layers824 and 826. Further, the channel formation region 814 is formed in thesemiconductor layer 813 below the conductive layers 824 and 826.

As the impurity element 853, an element having a conductivity type whichis different from that of the impurity element 851 added to thesemiconductor layer 805 is added. In this embodiment mode, boron (B) isadded. Note that parts of the impurity regions 815 formlow-concentration impurity regions which serve as LDD regions later.

Next, the sidewall insulating layers 827 which are in contact with theside surfaces of the conductive layers 823 and 825 are formed, andfurther, the sidewall insulating layers 828 which are in contact withthe side surfaces of the conductive layers 824 and 826 are formed (FIG.17C). The sidewall insulating layers 827 and 828 can be formed so as tobe in contact with the side surfaces of the conductive layers 823 and825 and the conductive layers 824, and 826, respectively, as follows: aninsulating layer having a single layer structure or a stacked-layerstructure is formed by a CVD method or a sputtering method using aninorganic material such as silicon oxide, silicon nitride, siliconoxynitride, or silicon nitride oxide, or an organic material such as anorganic resin, and the insulating layer is selectively etched byanisotropic etching mainly in a perpendicular direction. In thisembodiment mode, the surfaces of the sidewall insulating layers 827 and828, which are not in contact with the side surfaces of the conductivelayers 823 and 825 and the conductive layers 824 and 826, respectively,are curved. Specifically, the sidewall insulating layers 827 and 828 areformed so as to have an appropriate curvature to curve convexly withrespect to the side surfaces of the conductive layers 823 and 825 andthe conductive layers 824 and 826 which are in contact with the sidewallinsulating layers 827 and 828, respectively. It is needless to say thatthe present invention is not limited thereto, and the sidewallinsulating layers 827 and 828 may be angulated instead of being curved.Note that the sidewall insulating layers 827 and 828 can also be used asdoping masks for forming the low-concentration impurity regions whichserve as LDD regions.

Further, the etching for forming the sidewall insulating layers 827 and828 also etches the insulating layer 822 below the sidewall insulatinglayers 827 and 828 to selectively expose parts of the semiconductorlayers 805 and 813. Specifically, the semiconductor layer 805 in regionswhich do not overlap with the conductive layers 823 and 825 and thesidewall insulating layers 827 and the semiconductor layer 813 inregions which do not overlap with the conductive layers 824 and 826 andthe sidewall insulating layers 828 are selectively exposed. Furthermore,depending on the etching condition for forming the sidewall insulatinglayers 827 and 828, the upper portion of each of the semiconductorlayers 805 and 813 may also be etched to be reduced in thickness.

Next, a resist mask 874 is selectively formed so as to cover thesemiconductor layer 813. An impurity element 855 which imparts oneconductivity type is added to the semiconductor layer 805 at a thirdconcentration with the resist mask 874, the conductive layers 823 and825, and the sidewall insulating layers 827 which are in contact withthe side surfaces of the conductive layers 823 and 825 as masks (FIG.17C). In this embodiment mode, the impurity element 855 is added to thesemiconductor layer 805 with the conductive layers 823 and 825 and thesidewall insulating layers 827 which are in contact with the sidesurfaces of the conductive layers 823 and 825 as a mask, so that a pairof high-concentration impurity regions 809 and the pair oflow-concentration impurity regions 808 are formed in a self-alignedmanner. The high-concentration impurity regions 809 serve as source anddrain regions and the low-concentration impurity regions 808 serve asLDD regions. As the impurity element 855, an impurity element whichimparts the same conductivity type as the impurity element 851 added tothe semiconductor layer 805 is added. In this embodiment mode,phosphorus (P) is added. Further, as for the addition of the impurityelement, the third concentration is higher than the first concentration.Therefore, the concentration of the impurity element in thehigh-concentration impurity regions 809 is higher than that of thelow-concentration impurity regions 808.

Next, a resist mask 876 is selectively formed so as to cover thesemiconductor layer 805. An impurity element 857 which imparts oneconductivity type is added to the semiconductor layer 813 at a fourthconcentration with the resist mask 876, the conductive layers 824 and826, and the sidewall insulating layers 828 which are in contact withthe side surfaces of the conductive layers 824 and 826 as masks (FIG.17D). In this embodiment mode, the impurity element 857 is added to thesemiconductor layer 813 with the conductive layers 824 and 826 and thesidewall insulating layers 828 which are in contact with the sidesurfaces of the conductive layers 824 and 826 as a mask, so that a pairof high-concentration impurity regions 817 and the pair oflow-concentration impurity regions 816 are formed in a self-alignedmanner. The high-concentration impurity regions 817 serve as source anddrain regions, and the low-concentration impurity regions 816 serve asLDD regions. As the impurity element 857, an impurity element whichimparts the same conductivity type as the impurity element 853 added tothe semiconductor layer 813 is added. In this embodiment mode, boron (B)is added. Further, as for the addition of the impurity element, thefourth concentration is higher than the second concentration. Therefore,the concentration of the impurity element in the high-concentrationimpurity regions 817 is higher than that of the low-concentrationimpurity regions 816.

Through the above, the high-concentration impurity regions 809 whichserve as source and drain regions, the low-concentration impurityregions 808 which serve as LDD regions, and the channel formation region806 are formed in the semiconductor layer 805, and thehigh-concentration impurity regions 817 which serve as source and drainregions, the low-concentration impurity regions 816 which serve as LDDregions, and the channel formation region 814 are formed in thesemiconductor layer 813. In this embodiment mode, the channel formationregion 806 can be formed in a self-aligned manner by using thestacked-layer structure of the conductive layers 823 and 825, and thechannel formation region 814 can be formed in a self-aligned manner byusing the stacked-layer structure of the conductive layers 824 and 826.Further, the low-concentration impurity regions 808 can be formed in aself-aligned manner by using the conductive layers 823 and 825 and thesidewall insulating layers 827 which are in contact with the sidesurfaces of the conductive layers 823 and 825, and the low-concentrationimpurity regions 816 can be formed in a self-aligned manner by using theconductive layers 824 and 826 and the sidewall insulating layers 828which are in contact with the side surfaces of the conductive layers 824and 826.

Next, a metal layer 880 is formed over the exposed semiconductor layers805 and 813 (FIG. 18A).

The metal layer 880 is formed at least over the exposed semiconductorlayers 805 and 813. In this embodiment mode, the metal layer 880 isformed over the entire surface of the substrate. The metal layer 880 maybe formed of a material which reacts with the semiconductor layer andbecomes silicide. For example, the metal layer 880 may be formed by asputtering method or the like using a metal element such as nickel,titanium, cobalt, or platinum, or an alloy material containing any ofthe metal elements. The thickness of the metal layer 880 may be selectedas appropriate in accordance with the shape, thickness, and the like ofa silicide region to be formed. If a natural oxide layer has been formedon the exposed semiconductor layer when the metal layer 880 is formed,the metal layer 880 is formed after the natural oxide layer is removed.

Next, by heat treatment, silicide is formed in parts of thesemiconductor layers 805 and 813. In this embodiment mode, silicide isformed in the high-concentration impurity regions 809 formed in thesemiconductor layer 805 entirely from the top surface to the bottomsurface to form the high-concentration impurity regions 810. Inaddition, silicide is formed in the high-concentration impurity regions817 formed in the semiconductor layer 813 entirely from the top surfaceto the bottom surface to form the high-concentration impurity regions818 (FIG. 18B).

Silicide is formed when heat treatment is performed and reaction occursin a region where the semiconductor layer 805 and the metal layer 880are in contact with each other and a region where the semiconductorlayer 813 and the metal layer 880 are in contact with each other. Forexample, when nickel is formed as the metal layer 880, nickel silicideis formed in the high-concentration impurity regions 810 and 818.Similarly, when titanium, cobalt, or platinum is formed as the metallayer 880, titanium silicide, cobalt silicide, or platinum silicide isformed in the high-concentration impurity regions 810 and 818. The heattreatment may be performed using RTA or an annealing furnace.

The thickness, shape, and the like of the silicide region can beselected by appropriately controlling the thickness of the metal layer880, time for heat treatment, temperature of heat treatment, and thelike. In this embodiment mode, although the example in which silicide isentirely formed in the high-concentration impurity regions 810 and 818is described, it is possible that silicide is partially formed in thehigh-concentration impurity regions. In addition, silicide is notrequired to be formed in the high-concentration impurity regions.Further, the silicide region may extend to the regions overlapping withthe sidewall insulating layers 827 and 828, but silicide is preventedfrom being formed in the channel formation regions.

After silicide is formed, the metal layer which has not reacted isremoved by etching. For example, since the metal layer is formed overthe entire surface of the substrate in this embodiment mode, the metallayer above the insulating layer 835, the sidewall insulating layers 827and 828, and the conductive layers 825 and 826 is removed. Further, inthe case where the metal layer which has not reacted also remains abovethe high-concentration impurity regions 810 and 818, the remaining metallayer is removed.

Next, the insulating layers 836 and 838 are formed so as to cover theinsulating layers, conductive layers, and the like provided over thesubstrate 800. After the opening which reaches the conductive layer 852is formed in the insulating layers 835, 836, and 838, the conductivelayer 840 is formed in the opening. Similarly, after the openings whichreach the conductive layers 854 and 856 are formed in the insulatinglayers 835, 836, and 838, the conductive layers 841, 842, and 843 areformed in the openings (FIG. 18C). The conductive layers 840, 841, 842,and 843 serve as source and drain electrodes.

Each of the insulating layers 836 and 838 is formed by a CVD method, asputtering method, an ALD method, or a coating method, or by combinationof insulating layers formed by these methods to have a single layerstructure or a stacked-layer structure. For example, each of theinsulating layers 836 and 838 is formed using an inorganic insulatingmaterial such as silicon oxide, silicon nitride, silicon oxynitride, orsilicon nitride oxide; or an insulating material containing carbon suchas DLC (diamond-like carbon) by a CVD method, a sputtering method, or anALD method. Further, each of the insulating layers 836 and 838 can beformed using an organic insulating material such as epoxy, polyimide,polyamide, polyvinyl phenol, benzocyclobutene, or acrylic; or a siloxanematerial such as a siloxane resin by a coating method. Note that thesiloxane material corresponds to a material having Si—O—Si bonds.Siloxane includes a skeleton structure of a bond of silicon (Si) andoxygen (O). As a substituent, an organic group containing at leasthydrogen (such as an alkyl group or aromatic hydrocarbon) is used.Alternatively, a fluoro group, or a fluoro group and an organic groupcontaining at least hydrogen can be used as a substituent. Further, theinsulating layers 836 and 838 may also be formed by forming aninsulating layer by a CVD method, a sputtering method, or an ALD methodand then performing high-density plasma treatment thereto in an oxygenatmosphere or a nitrogen atmosphere. Although the two-layer-stackedstructure of the insulating layers 836 and 838 is formed over theconductive layers 825 and 826 and the like in this embodiment mode,either a single layer structure or a stacked-layer structure includingthree or more layers may be employed as well.

The conductive layers 840, 841, 842, and 843 can be formed by a CVDmethod or a sputtering method using a metal element such as aluminum(Al), tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo),nickel (Ni), platinum (Pt), copper (Cu), gold (Au), silver (Ag),manganese (Mg), neodymium (Nd), carbon (C), or silicon (Si), or an alloymaterial or a compound material containing any of the metal elements, tohave a single layer structure or a stacked-layer structure. As examplesof an alloy material containing aluminum, an alloy material containingaluminum as its main component and nickel, and an alloy materialcontaining aluminum as its main component, nickel, and at least one ofcarbon and silicon can be given. The conductive layers 840, 841, 842,and 843 can employ, for example, a stacked-layer structure of a barrierlayer, an aluminum-silicon (Al—Si) layer, and a barrier layer, or astacked-layer structure of a barrier layer, an aluminum-silicon (Al—Si)layer, a titanium nitride layer, and a barrier layer. Note that thebarrier layer corresponds to a thin film formed of titanium, nitride oftitanium, molybdenum, or nitride of molybdenum. Aluminum and aluminumsilicon which have low resistance and are inexpensive are suitable forforming the conductive layers 840, 841, 842, and 843. Further,generation of a hillock of aluminum or aluminum silicon can be preventedwhen upper and lower barrier layers are provided, which is preferable.

Each of the openings formed in the insulating layers 835, 836, and 838is formed so that at least part thereof overlaps with the conductivelayer 852, 854, or 856. Further, the openings are formed so that theconductive layers 852, 854, and 856 are exposed at the bottom of theopenings. At this time, the exposed conductive layers 852, 854, and 856are partially etched in some cases, but the conductive layers 852, 854,and 856 are made to remain at least at the bottom of the openings.

The conductive layer 840 reaches the conductive layer 852 through theopening formed in the insulating layers 835, 836, and 838. Theconductive layer 852 is in contact with the high-concentration impurityregion 810. Therefore, the conductive layer 840 serving as a source ordrain electrode and the high-concentration impurity region 810 servingas a source or drain region are electrically connected to each otherwith the conductive layer 852 serving as a connecting wiring interposedtherebetween. Similarly, the conductive layer 841 reaches the conductivelayer 854 through the opening formed in the insulating layers 835, 836,and 838. The conductive layer 854 is in contact with thehigh-concentration impurity region 810. Therefore, the conductive layer841 serving as a source or drain electrode and the high-concentrationimpurity region 810 serving as a source or drain region are electricallyconnected to each other with the conductive layer 854 serving as aconnecting wiring interposed therebetween.

The conductive layer 842 reaches the conductive layer 854 through theopening formed in the insulating layers 835, 836, and 838. Theconductive layer 854 is also in contact with the high-concentrationimpurity region 818. Therefore, the conductive layer 842 serving as asource or drain electrode and the high-concentration impurity region 818serving as a source or drain region are electrically connected to eachother with the conductive layer 854 serving as a connecting wiringinterposed therebetween. Similarly, the conductive layer 843 reaches theconductive layer 856 through the opening formed in the insulating layers835, 836, and 838. The conductive layer 856 is in contact with thehigh-concentration impurity region 818. Therefore, the conductive layer843 serving as a source or drain electrode and the high-concentrationimpurity region 818 serving as a source or drain region are electricallyconnected to each other with the conductive layer 856 serving as aconnecting wiring interposed therebetween.

The conductive layers 840, 841, 842, and 843 are preferably in contactwith the conductive layers 852, 854, and 856 serving as connectingwirings in regions which do not overlap with the semiconductor layers805 and 813. With such a structure, the semiconductor layer can beprevented from being removed, and contact between the conductive layerand the semiconductor layer can be favorable. Accordingly, reliabilityof the semiconductor device completed can be improved.

It is also possible that the conductive layer 840, 841, 842, or 843serving as a source or drain electrode is electrically connected to thesemiconductor layers 805 or 813 through an opening formed in theinsulating layers 836 and 838 in a region where the insulating layer 835is not formed. In this case, also when the semiconductor layer has sucha thickness that part thereof is removed by etching in forming theopening in the insulating layers 836 and 838, favorable contact can beobtained with the conductive layers 852, 854, and 856 serving asconnecting wirings.

In addition, silicide is formed in the high-concentration impurityregions 810 and 818, and the conductive layers serving as connectingwirings are in contact with the high-concentration impurity regions 810and 818 in which silicide is formed. Therefore, contact resistancebetween the conductive layers and the semiconductor layer can bereduced. As a result, deterioration of operating characteristics of thesemiconductor device due to reduction in on current can be prevented.

As described above, a semiconductor device including the n-channel TFT710 formed using the semiconductor layer 805 and the p-channel TFT 720formed using the semiconductor layer 813 can be manufactured. In thisembodiment mode, the high-concentration impurity region 810 formed inthe semiconductor layer 805 and the high-concentration impurity region818 formed in the semiconductor layer 813 are electrically connected toeach other through the conductive layer 854 serving as a connectingwiring, so that the CMOS transistor 730 having the n-channel TFT and thep-channel TFT is formed. Note that the present invention is not limitedthereto, and the high-concentration impurity regions 810 and 818 may beelectrically connected to each other through the conductive layerserving as a source or drain electrode.

The CMOS transistor 760 can be manufactured similarly to the CMOStransistor 730. For example, the TFT 740 can be formed similarly to theTFT 710. The TFT 750 can be formed similarly to the TFT 720. Thus, theCMOS transistor 760 including the n-channel TFT 740 and the p-channelTFT 750 can be formed.

In the CMOS transistor 760 shown in this embodiment mode, thehigh-concentration impurity region 910 formed in the semiconductor layer905 of the TFT 740 and the high-concentration impurity region 918 formedin the semiconductor layer 913 of the TFT 750 are electrically connectedto each other through the conductive layer 844 serving as a source ordrain electrode, so that the CMOS transistor 760 having the n-channelTFT and the p-channel TFT is formed.

In the semiconductor device including a plurality of CMOS transistors ofthis embodiment mode, in one CMOS transistor, TFTs having differentconductivity types are electrically connected to each other through aconductive layer serving as a connecting wiring. In another CMOStransistor, TFTs having different conductivity types are electricallyconnected to each other through a conductive layer serving as a sourceor drain electrode. With such a structure, a multilayer wiring structurecan be made, and thus much higher integration is possible.

In this embodiment mode, the insulating layer is provided between theconductive layer serving as a connecting wiring and the semiconductorlayer, whereby the conductive layer serving as a connecting wiring andthe semiconductor layer are insulated with the insulating layer except aregion where the conductive layer serving as a connecting wiring and thesemiconductor layer are in contact with each other. Therefore, it isalso possible to provide the conductive layer serving as a connectingwiring so as to get across a region below the semiconductor layer. As aresult, much higher integration can be achieved.

In addition, in this embodiment mode, the gate electrode formed of thestacked-layer structure of the conductive layers 823 and 825 branches toget across the semiconductor layer 805 included in the TFT 710 and thesemiconductor layer 905 included in the TFT 740. The branched gateelectrodes (the stacked-layer structure of the conductive layers 823 and825) are united in a region which does not overlap with thesemiconductor layers 805 and 905. In other words, two gate electrodesbranched from the continuous gate electrode are formed so as to getacross the semiconductor layers 805 and 905. Similarly, the gateelectrode formed of the stacked-layer structure of the conductive layers824 and 826 branches to get across the semiconductor layer 813 includedin the TFT 720 and the semiconductor layer 913 included in the TFT 750.The branched gate electrodes (the stacked-layer structure of theconductive layers 824 and 826) are united in a region which does notoverlap with the semiconductor layers 813 and 913. In other words, twogate electrodes branched from the continuous gate electrode are formedso as to get across the semiconductor layers 813 and 913 (FIG. 14).

Although this embodiment mode shows an example in which the CMOStransistor including two thin film transistors with differentconductivity types is manufactured, the present invention is not limitedthereto. As an example of manufacturing two thin film transistors,instead of manufacturing two thin film transistors with differentconductivity types, two thin film transistors with the same conductivitytype may be manufactured. For example, two n-channel thin filmtransistors (nMOS transistors) or two p-channel thin film transistors(pMOS transistors) may be manufactured. An impurity element added to thesemiconductor layer may be appropriately selected to form the nMOStransistor, the pMOS transistor, or the like. In addition, the thin filmtransistor included in the CMOS transistor according to the presentinvention is not limited to have the structure shown in this embodimentmode, and the thin film transistors shown in other embodiment modes canalso be employed as appropriate.

In the semiconductor device to which the present invention is applied,electrical connection between the conductive layer and the semiconductorlayer can be favorable, so that reliability of the semiconductor devicecan be improved. Therefore, since contact resistance between theconductive layer and the semiconductor layer can be reduced, it ispossible to prevent signal delay and achieve low power consumption ofthe semiconductor device completed. As a result, a high performancesemiconductor device can be achieved.

This embodiment mode can be combined with other embodiment modes in thisspecification as appropriate.

(Embodiment Mode 5)

The semiconductor device according to the present invention can beapplied to an integrated circuit such as a CPU (central processingunit). In this embodiment mode, an example of a CPU to which thesemiconductor device shown in the preceding embodiment modes is appliedwill be described below with reference to the drawings.

A CPU 3660 shown in FIG. 19 mainly includes an arithmetic logic unit(ALU) 3601, an ALU controller 3602, an instruction decoder 3603, aninterrupt controller 3604, a timing controller 3605, a register 3606, aregister controller 3607, a bus interface (Bus I/F) 3608, an erasableprogrammable ROM 3609, and a ROM interface (ROM I/F) 3620, over asubstrate 3600. The ROM 3609 and the ROM interface 3620 may be providedover a different chip. Such various circuits included in the CPU 3660can be formed by using the thin film transistor described in any ofEmbodiment Modes 1 to 4, or an nMOS transistor, a pMOS transistor, aCMOS transistor, or the like formed by combining the thin filmtransistors.

Note that the CPU 3660 shown in FIG. 19 is only an example whosestructure is simplified, and an actual CPU has various structuresdepending on the uses. Therefore, the structure of the CPU to which thepresent invention is applied is not limited to that shown in FIG. 19.

An instruction input to the CPU 3660 through the bus interface 3608 isinput to the instruction decoder 3603 and decoded therein, and theninput to the ALU controller 3602, the interrupt controller 3604, theregister controller 3607, and the timing controller 3605.

The ALU controller 3602, the interrupt controller 3604, the registercontroller 3607, and the timing controller 3605 perform various controlsbased on the decoded instruction. Specifically, the ALU controller 3602generates a signal for controlling the drive of the ALU 3601. While theCPU 3660 is executing a program, the interrupt controller 3604 judges aninterrupt request from an external input/output device or a peripheralcircuit based on its priority or a mask state, and processes therequest. The register controller 3607 generates an address of theregister 3606, and reads/writes data from/to the register 3606 inaccordance with the state of the CPU.

The timing controller 3605 generates a signal for controlling a timingof drive of the ALU 3601, the ALU controller 3602, the instructiondecoder 3603, the interrupt controller 3604, and the register controller3607. For example, the timing controller 3605 is provided with aninternal clock generator for generating an internal clock signal CLK2(3622) based on a reference clock signal CLK1 (3621), and supplies theinternal clock signal CLK2 to the above various circuits.

A display device in which a pixel portion, a CPU, and the other circuitsare formed over the same substrate, a so-called system-on-panel is shownin FIG. 20. A pixel portion 3701, a scanning line driver circuit 3702for selecting a pixel included in the pixel portion 3701, and a signalline driver circuit 3703 for supplying a video signal to each selectedpixel are provided over a substrate 3700. A CPU 3704 and other circuitssuch as a control circuit 3705 are connected to wirings drawn from thescanning line driver circuit 3702 and the signal line driver circuit3703. Note that the control circuit includes an interface. Further, aconnection portion for connection to an FPC terminal is provided at theedge of the substrate to communicate with an external signal.

As the other circuits, in addition to the control circuit 3705, an imagesignal processing circuit, a power source circuit, a gray scale powersource circuit, a video RAM, a memory (e.g., DRAM, SRAM, or PROM),and/or the like can be provided. Further, such a circuit may be formedusing an IC chip and mounted on the substrate. Furthermore, the scanningline driver circuit 3702 and the signal line driver circuit 3703 are notnecessarily formed over the same substrate as the pixel portion; forexample, the scanning line driver circuit 3702 may be formed over thesame substrate as the pixel portion and the signal line driver circuit3703 may be formed using an IC chip and mounted on the substrate.

Note that although the example in which the semiconductor deviceaccording to the present invention is applied to a CPU is described inthis embodiment mode, the present invention is not limited thereto. Forexample, the semiconductor device according to the present invention canbe applied to a pixel portion, a driver circuit portion, or the like ofa display device including an organic light-emitting element, aninorganic light-emitting element, a liquid crystal element, or the like.Furthermore, by applying the present invention, the following can alsobe manufactured; a camera such as a digital camera, an audio reproducingdevice such as a car audio system, a laptop computer, a game machine, aportable information terminal (e.g., a cellular phone or a mobile gamemachine), an image reproducing device provided with a recording mediumsuch as a home-use game machine, and the like.

In the semiconductor device to which the present invention is applied,electrical connection between the conductive layer and the semiconductorlayer can be favorable, so that reliability of the semiconductor devicecan be improved.

Further, since contact resistance can be reduced when the transistorhaving a silicide region as shown in the preceding embodiment modes isused, it is possible to prevent signal delay of the semiconductordevice. As a result, the circuit can be driven at high speed.

(Embodiment Mode 6)

In this embodiment mode, one example of a usage mode of thesemiconductor device described in the preceding embodiment modes will bedescribed. Specifically, an application example of a semiconductordevice to/from which data can be input/output without contact will bedescribed below with reference to the drawings. The semiconductor deviceto/from which data can be input/output without contact is also called anRFID tag, an ID tag, an IC tag, an IC chip, an RF tag, a wireless tag,an electronic tag, or a wireless chip depending on the usage mode.

One example of a top structure of a semiconductor device described inthis embodiment mode is described with reference to FIG. 21A. Asemiconductor device 2180 shown in FIG. 21A includes a thin filmintegrated circuit 2131 including a plurality of elements such as thinfilm transistors for forming a memory portion and a logic portion, and aconductive layer 2132 which serves as an antenna. The conductive layer2132 which serves as an antenna is electrically connected to the thinfilm integrated circuit 2131. The thin film transistor according to thepresent invention described in any of Embodiment Modes 1 to 4 can beapplied to the thin film integrated circuit 2131.

Schematic cross-sectional views of FIG. 21A are shown in FIGS. 21B and21C. The conductive layer 2132 which serves as an antenna is providedabove the elements for forming the memory portion and the logic portion;for example, the conductive layer 2132 which serves as an antenna can beprovided above the thin film integrated circuit 2131 with the structuredescribed in Embodiment Mode 4 with an insulating layer 2130 interposedtherebetween (FIG. 21B). Alternatively, the conductive layer 2132 whichserves as an antenna may be provided over a substrate 2133 and then thesubstrate 2133 and the thin film integrated circuit 2131 may be attachedto each other so as to sandwich the conductive layer 2132 (FIG. 21C).The example in which a conductive layer 2136 provided over theinsulating layer 2130 and the conductive layer 2132 which serves as anantenna are electrically connected to each other with conductiveparticles 2134 contained in an adhesive resin 2135 is shown in FIG. 21C.

Note that, although the example in which the conductive layer 2132 whichserves as an antenna is provided in the shape of a coil and either anelectromagnetic induction method or an electromagnetic coupling methodis employed is described in this embodiment mode, the semiconductordevice of the present invention is not limited thereto, and a microwavemethod may be employed as well. In the case of a microwave method, theshape of the conductive layer 2132 which serves as an antenna may bedecided as appropriate depending on the wavelength of an electromagneticwave.

For example, when the microwave method (e.g., with an UHF band (in therange of 860 to 960 MHz), a frequency band of 2.45 GHz, or the like) isemployed as the signal transmission method of the semiconductor device2180, the shape such as the length of the conductive layer which servesas an antenna may be set as appropriate in consideration of thewavelength of an electromagnetic wave used in sending a signal. Forexample, the conductive layer which serves as an antenna can be formedinto the shape of a line (e.g., a dipole antenna (FIG. 22A)), into theflat shape (e.g., a patch antenna (FIG. 22B)), into the shape of aribbon (FIGS. 22C and 22D), or the like. Further, the shape of theconductive layer 2132 which serves as an antenna is not limited to aline, and the conductive layer in the shape of a curved line, in anS-shape, or in a shape combining them may be provided as well inconsideration of the wavelength of the electromagnetic wave.

The conductive layer 2132 which serves as an antenna is formed of aconductive material by a CVD method, a sputtering method, a printingmethod such as a screen printing method or a gravure printing method, adroplet discharging method, a dispenser method, a plating method, or thelike. As the conductive material, any of metal elements such as aluminum(Al), titanium (Ti), silver (Ag), copper (Cu), gold (Au), platinum (Pt),nickel (Ni), palladium (Pd), tantalum (Ta), molybdenum (Mo), and thelike, or an alloy material or a compound material including any of theabove metal elements as its main component is used, and the conductivelayer 2132 employs a single layer structure or a stacked-layerstructure.

For example, when the conductive layer 2132 which serves as an antennais formed by a screen printing method, it can be provided by selectivelyprinting a conductive paste in which conductive particles with a graindiameter of several nm to several tens of μm are dissolved or dispersedin an organic resin. As the conductive particle, at least one of metalparticles such as silver (Ag), gold (Ag), copper (Cu), nickel (Ni),platinum (Pt), palladium (Pd), tantalum (Ta), molybdenum (Mo), titanium(Ti), and the like; fine particles of silver halide; or dispersivenanoparticles can be used. Further, as the organic resin included in theconductive paste, at least one of organic resins which function as abinder, a solvent, a dispersing agent, and a coating material of metalparticles can be used. Typically, an organic resin such as an epoxyresin and a silicone resin can be given as an example. Further, informing the conductive layer, it is preferable to bake the conductivepaste after providing it. For example, in the case of using fineparticles (e.g., with a grain diameter of 1 to 100 nm, inclusive)containing silver as its main component as a material of the conductivepaste, the conductive layer can be formed by baking the conductive pasteat temperatures in the range of 150 to 300° C. to harden it.Alternatively, fine particles containing solder or lead-free solder asits main component may be used. In this case, fine particles with agrain diameter of less than or equal to 20 μm are preferably used.Solder and lead-free solder have the advantage of low cost.

Next, an operation example of the semiconductor device according to thisembodiment mode is described.

The semiconductor device 2180 has a function of exchanging data withoutcontact, and includes a high-frequency circuit 81, a power sourcecircuit 82, a reset circuit 83, a clock generating circuit 84, a datademodulating circuit 85, a data modulating circuit 86, a controllingcircuit 87 for controlling other circuits, a memory circuit 88, and anantenna 89 (FIG. 23A). The high-frequency circuit 81 receives a signalfrom the antenna 89 and then outputs a signal received from the datamodulating circuit 86 through the antenna 89. The power source circuit82 generates a power source potential from a received signal. The resetcircuit 83 generates a reset signal. The clock generating circuit 84generates various clock signals based on a received signal input fromthe antenna 89. The data demodulating circuit 85 demodulates a receivedsignal and outputs it to the controlling circuit 87. The data modulatingcircuit 86 modulates a signal received from the controlling circuit 87.As the controlling circuit 87, for example, a code extracting circuit91, a code judging circuit 92, a CRC judging circuit 93, and an outputunit circuit 94 are provided. Note that the code extracting circuit 91extracts each of a plurality of codes included in an instruction sent tothe controlling circuit 87. The code judging circuit 92 judges thecontent of the instruction by comparing each extracted code with a codecorresponding to a reference. The CRC judging circuit 93 detects whetheror not there is a transmission error or the like based on a judged code.In FIG. 23A, in addition to the controlling circuit 87, thehigh-frequency circuit 81 and the power source circuit 82 which areanalog circuits are included.

Next, one example of an operation of the aforementioned semiconductordevice is described. First, a wireless signal is received by the antenna89 and then sent to the power source circuit 82 through thehigh-frequency circuit 81, so that a high power source potential(hereinafter referred to as VDD) is generated. VDD is supplied to eachcircuit in the semiconductor device 2180. A signal sent to the datademodulating circuit 85 through the high-frequency circuit 81 isdemodulated (hereinafter this signal is called a demodulated signal).Moreover, signals passed through the reset circuit 83 and the clockgenerating circuit 84 through the high-frequency circuit 81, and thedemodulated signal are sent to the controlling circuit 87. The signalssent to the controlling circuit 87 are analyzed by the code extractingcircuit 91, the code judging circuit 92, the CRC judging circuit 93, andthe like. Then, based on the analyzed signals, information of thesemiconductor device stored in the memory circuit 88 is output. Theoutput information of the semiconductor device is encoded through theoutput unit circuit 94. Further, the encoded information of thesemiconductor device 2180 passes through the data modulating circuit 86and then is sent by the antenna 89 as a wireless signal. Note that a lowpower source potential (hereinafter called VSS) is common in theplurality of circuits included in the semiconductor device 2180 and GNDcan be used as VSS.

In this manner, by sending a signal from a communication unit (e.g., areader/writer or a unit having a function of a reader or a writer) tothe semiconductor device 2180 and receiving a signal sent from thesemiconductor device 2180 by the reader/writer, data of thesemiconductor device can be read.

Further, in the semiconductor device 2180, a power source voltage may besupplied to each circuit by electromagnetic waves without providing apower source (a battery), or a power source (battery) may be provided sothat a power source voltage is supplied to each circuit by bothelectromagnetic waves and the power source (battery).

Next, one example of usage modes of the semiconductor device to/fromwhich data can be input/output without contact is described. The sidesurface of a mobile terminal including a display portion 3210 isprovided with a communication unit 3200, and the side surface of aproduct 3220 is provided with a semiconductor device 3230 (FIG. 23B).Note that the communication unit 3200 has a function of reading andtransmitting a signal like a reader/writer, or has only a function ofreading a signal or transmitting a signal. When the communication unit3200 is held over the semiconductor device 3230 included in the product3220, the display portion 3210 displays information on the product, suchas a row material, a place of origin, an inspection result for eachproduction step, a history of distribution process, description of theproduct, or the like. Further, while a product 3260 is transferred by aconveyer belt, the product 3260 can be inspected by using areader/writer 3240 and a semiconductor device 3250 provided for theproduct 3260 (FIG. 23C). As the semiconductor devices 3230 and 3250, theaforementioned semiconductor device 2180 can be applied. In this manner,by using the semiconductor device according to the present invention inthe system, information can be obtained easily and higher performanceand a high added value are achieved. Further, since the semiconductordevice according to the present invention has high reliability, amalfunction or the like of a semiconductor device provided for a productcan be prevented.

Note that an applicable range of the semiconductor device according tothe present invention is wide in addition to the above, and thesemiconductor device can be applied to any product as long as itclarifies information of an object, such as the history thereof, withoutcontact and is useful for production, management, or the like. Forexample, the semiconductor device can be provided for bills, coins,securities, certificates, bearer bonds, packing containers, books,recording media, personal belongings, vehicles, food, clothing, healthproducts, commodities, medicine, electronic devices, and the like.Examples of them are described with reference to FIGS. 11A to 11H.

The bills and coins are money distributed to the market, and include onevalid in a certain area (a cash voucher), memorial coins, and the like.The securities refer to checks, certificates, promissory notes, and thelike (FIG. 11A). The certificates refer to driver's licenses,certificates of residence, and the like (FIG. 11B). The bearer bondsrefer to stamps, rice coupons, various gift certificates, and the like(FIG. 11C). The packing containers refer to wrapping paper for foodcontainers and the like, plastic bottles, and the like (FIG. 11D). Thebooks refer to hardbacks, paperbacks, and the like (FIG. 11E). Therecording media refer to DVD software, video tapes, and the like (FIG.11F). The vehicles refer to wheeled vehicles such as bicycles, ships,and the like (FIG. 11G). The personal belongings refer to bags, glasses,and the like (FIG. 11H). The food refers to food articles, drink, andthe like. The clothing refers to clothes, footwear, and the like. Thehealth products refer to medical instruments, health instruments, andthe like. The commodities refer to furniture, lighting equipment, andthe like. The medicine refers to medical products, pesticides, and thelike. The electronic devices refer to liquid crystal display devices, ELdisplay devices, television devices (TV sets and flat-panel TV sets),cellular phones, and the like.

Forgery can be prevented by providing the semiconductor device 2180 forthe bills, the coins, the securities, the certificates, the bearerbonds, or the like. Further, the efficiency of an inspection system, asystem used in a rental shop, or the like can be improved by providingthe semiconductor device 2180 for the packing containers, the books, therecording media, the personal belongings, the food, the commodities, theelectronic devices, or the like. Forgery or theft can be prevented byproviding the semiconductor device 2180 for the vehicles, the healthproducts, the medicine, or the like; and in the case of the medicine,medicine can be prevented from being taken mistakenly. The semiconductordevice 2180 can be provided by being attached to the surface or beingembedded in the object. For example, in the case of a book, thesemiconductor device 2180 may be embedded in the paper; and in the caseof a package made of an organic resin, the semiconductor device 2180 maybe embedded in the organic resin.

As described above, the efficiency of an inspection system, a systemused in a rental shop, or the like can be improved by providing thesemiconductor device 2180 for the packing containers, the recordingmedia, the personal belonging, the food, the clothing, the commodities,the electronic devices, or the like. Further, by providing thesemiconductor device 2180 for the vehicles or the like, forgery or theftthereof can be prevented. Further, by implanting the semiconductordevice 2180 in a creature such as an animal, an individual creature canbe easily identified. For example, by implanting/attaching thesemiconductor device with a sensor into a creature such as livestock,its health condition such as a current body temperature as well as itsbirth year, sex, breed, or the like can be easily managed.

This embodiment mode can be freely combined with the precedingembodiment modes.

This application is based on Japanese Patent Application Serial No.2007-041602 filed with Japan Patent Office on Feb. 22, 2007, the entirecontents of which are hereby incorporated by reference.

1. A semiconductor device comprising: a semiconductor layer providedover a first insulating layer, the semiconductor layer including asource region and overlapping with a gate electrode at least partly; afirst conductive layer provided on the first insulating layer and underthe source region; a second insulating layer provided over the gateelectrode and the semiconductor layer, the second insulating layerincluding an opening; and a second conductive layer at least formed inthe opening of the second insulating layer and in contact with the firstconductive layer, wherein at least a part of the opening overlaps withthe first conductive layer, wherein the source region is providedoutside a region which overlaps with the gate electrode, and wherein thefirst conductive layer is in contact with the source region.
 2. Thesemiconductor device according to claim 1, wherein the semiconductorlayer has a thickness of 10 to 25 nm.
 3. The semiconductor deviceaccording to claim 1, wherein an end portion of the first conductivelayer is tapered.
 4. The semiconductor device according to claim 1further comprising a third insulating layer provided on part of thefirst conductive layer and between the first insulating layer and thesemiconductor layer.
 5. The semiconductor device according to claim 1,further comprising a third conductive layer over the second conductivelayer, the third conductive layer serving as an antenna.
 6. Thesemiconductor device according to claim 1, wherein a side surface of thesource region is not in contact with the first conductive layer.
 7. Asemiconductor device comprising: a semiconductor layer provided over afirst insulating layer, the semiconductor layer including a sourceregion and overlapping with a gate electrode at least partly; a firstconductive layer provided on the first insulating layer and under thesource region; a second insulating layer provided over the gateelectrode and the semiconductor layer, the second insulating layerincluding an opening; and a second conductive layer at least formed inthe opening of the second insulating layer and in contact with the firstconductive layer, wherein at least a part of the opening overlaps withthe first conductive layer, wherein the source region is providedoutside a region which overlaps with the gate electrode, wherein thefirst conductive layer is in contact with the source region, and whereinthe gate electrode is formed of a stacked-layer structure comprising alower conductive layer and an upper conductive layer.
 8. Thesemiconductor device according to claim 7, wherein the semiconductorlayer has a thickness of 10 to 25 nm.
 9. The semiconductor deviceaccording to claim 7, wherein an end portion of the first conductivelayer is tapered.
 10. The semiconductor device according to claim 7further comprising a third insulating layer provided on part of thefirst conductive layer and between the first insulating layer and thesemiconductor layer.
 11. The semiconductor device according to claim 7,further comprising a third conductive layer over the second conductivelayer, the third conductive layer serving as an antenna.
 12. Thesemiconductor device according to claim 7, wherein a side surface of thesource region is not in contact with the first conductive layer.
 13. Asemiconductor device comprising: a semiconductor layer provided over afirst insulating layer, the semiconductor layer including a sourceregion and overlapping with a gate electrode at least partly; a firstconductive layer provided on the first insulating layer and under thesource region; a second insulating layer provided over the gateelectrode and the semiconductor layer, the second insulating layerincluding an opening; and a second conductive layer at least formed inthe opening of the second insulating layer and in contact with the firstconductive layer, wherein at least a part of the opening overlaps withthe first conductive layer, wherein the source region is providedoutside a region which overlaps with the gate electrode, wherein thefirst conductive layer is in contact with the source region, wherein thegate electrode is formed of a stacked-layer structure comprising a lowerconductive layer and an upper conductive layer, and wherein a width ofthe lower conductive layer is larger than that of the upper conductivelayer.
 14. The semiconductor device according to claim 13, wherein thesemiconductor layer has a thickness of 10 to 25 nm.
 15. Thesemiconductor device according to claim 13, wherein an end portion ofthe first conductive layer is tapered.
 16. The semiconductor deviceaccording to claim 13 further comprising a third insulating layerprovided on part of the first conductive layer and between the firstinsulating layer and the semiconductor layer.
 17. The semiconductordevice according to claim 13, further comprising a third conductivelayer over the second conductive layer, the third conductive layerserving as an antenna.
 18. The semiconductor device according to claim13, wherein a side surface of the source region is not in contact withthe first conductive layer.